Surface acoustic wave devices for sensor applications

Surface acoustic wave （SAW） devices have been widely used in different fields and will continue to be of great importance in the foreseeable future. These devices are compact, cost efficient, easy to fabricate, and have a high performance, among other advantages. SAW devices can work as filters, sig...

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Bibliographic Details
Published inJournal of semiconductors Vol. 37; no. 2; pp. 1 - 9
Main Author 刘博 陈晓 蔡华林 穆罕默德·阿里·穆罕默德 田祥光 陶璐琪 杨轶 任天令
Format Journal Article
LanguageEnglish
Published 01.02.2016
Subjects
Biosensors
Devices
Humidity
Pressure sensors
Semiconductors
Sensors
Surface acoustic wave devices
Surface acoustic waves
传感器应用
信号处理单元
压力传感器
声表面波器件
温度传感器
湿度传感器
生物传感器
表面声波器件
Online AccessGet full text
ISSN1674-4926
DOI10.1088/1674-4926/37/2/021001

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Summary:Surface acoustic wave （SAW） devices have been widely used in different fields and will continue to be of great importance in the foreseeable future. These devices are compact, cost efficient, easy to fabricate, and have a high performance, among other advantages. SAW devices can work as filters, signal processing units, sensors and actuators. They can even work without batteries and operate under harsh environments. In this review, the operating principles of SAW sensors, including temperature sensors, pressure sensors, humidity sensors and biosensors, will be discussed. Several examples and related issues will be presented. Technological trends and future developments will also be discussed.
Bibliography:Surface acoustic wave （SAW） devices have been widely used in different fields and will continue to be of great importance in the foreseeable future. These devices are compact, cost efficient, easy to fabricate, and have a high performance, among other advantages. SAW devices can work as filters, signal processing units, sensors and actuators. They can even work without batteries and operate under harsh environments. In this review, the operating principles of SAW sensors, including temperature sensors, pressure sensors, humidity sensors and biosensors, will be discussed. Several examples and related issues will be presented. Technological trends and future developments will also be discussed.
11-5781/TN
surface acoustic wave; sensor; sensor application
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ISSN:1674-4926
DOI:10.1088/1674-4926/37/2/021001