Surface acoustic wave devices for sensor applications
Surface acoustic wave （SAW） devices have been widely used in different fields and will continue to be of great importance in the foreseeable future. These devices are compact, cost efficient, easy to fabricate, and have a high performance, among other advantages. SAW devices can work as filters, sig...
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| Published in | Journal of semiconductors Vol. 37; no. 2; pp. 1 - 9 |
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| Main Author | |
| Format | Journal Article |
| Language | English |
| Published |
01.02.2016
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| Subjects | |
| Online Access | Get full text |
| ISSN | 1674-4926 |
| DOI | 10.1088/1674-4926/37/2/021001 |
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| Abstract | Surface acoustic wave （SAW） devices have been widely used in different fields and will continue to be of great importance in the foreseeable future. These devices are compact, cost efficient, easy to fabricate, and have a high performance, among other advantages. SAW devices can work as filters, signal processing units, sensors and actuators. They can even work without batteries and operate under harsh environments. In this review, the operating principles of SAW sensors, including temperature sensors, pressure sensors, humidity sensors and biosensors, will be discussed. Several examples and related issues will be presented. Technological trends and future developments will also be discussed. |
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| AbstractList | Surface acoustic wave （SAW） devices have been widely used in different fields and will continue to be of great importance in the foreseeable future. These devices are compact, cost efficient, easy to fabricate, and have a high performance, among other advantages. SAW devices can work as filters, signal processing units, sensors and actuators. They can even work without batteries and operate under harsh environments. In this review, the operating principles of SAW sensors, including temperature sensors, pressure sensors, humidity sensors and biosensors, will be discussed. Several examples and related issues will be presented. Technological trends and future developments will also be discussed. Surface acoustic wave (SAW) devices have been widely used in different fields and will continue to be of great importance in the foreseeable future. These devices are compact, cost efficient, easy to fabricate, and have a high performance, among other advantages. SAW devices can work as filters, signal processing units, sensors and actuators. They can even work without batteries and operate under harsh environments. In this review, the operating principles of SAW sensors, including temperature sensors, pressure sensors, humidity sensors and biosensors, will be discussed. Several examples and related issues will be presented. Technological trends and future developments will also be discussed. |
| Author | 刘博 陈晓 蔡华林 穆罕默德·阿里·穆罕默德 田祥光 陶璐琪 杨轶 任天令 |
| AuthorAffiliation | Institute of Microelectronics, Tsinghua University, Beijing 100084, China Tsinghua National Laboratory for Information Science and Technology （TNList）, Tsinghua University, Beijing 100084, China |
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| Cites_doi | 10.1016/j.sna.2013.08.021 10.1109/JSEN.2006.884548 10.1016/j.tibtech.2009.09.003 10.1016/S0925-4005(00)00361-0 10.1049/el.2009.2520 10.1016/j.snb.2009.02.050 10.1016/j.diamond.2008.01.082 10.1186/1556-276X-7-363 10.1016/S0925-9635(02)00316-3 10.1016/j.snb.2015.03.069 10.1063/1.1754276 10.3390/s141120620 10.1021/ac010859e 10.1016/S0925-4005(98)00026-4 10.1109/JSEN.2015.2394776 10.1038/srep07206 10.1016/j.mee.2008.12.063 10.1016/j.matlet.2011.09.003 10.1109/22.899037 10.1016/S0165-2125(02)00030-6 10.1109/TUFFC.2012.2285 10.1016/j.sna.2014.01.028 10.4028/www.scientific.net/AMM.656.413 10.1016/j.snb.2012.12.074 10.1016/S0924-4247(98)80011-3 10.1049/mnl.2012.0569 10.1016/j.snb.2013.01.068 10.1109/LED.2013.2283305 10.1016/0925-4005(93)85197-I 10.1016/j.snb.2004.04.055 10.1016/j.sna.2013.06.016 10.3390/s130606910 10.1109/ULTSYM.1993.339458 10.1016/j.sna.2010.02.013 10.1016/j.mee.2012.02.022 10.1016/j.sna.2014.10.006 10.1007/978-3-662-04223-6 10.1063/1.2234305 10.1016/j.bios.2013.05.021 10.1088/0957-4484/22/26/265504 10.1016/j.proeng.2014.11.383 10.1016/j.ijleo.2014.06.090 10.1007/s10068-011-0194-3 10.1016/0925-4005(94)87061-6 10.1016/j.sna.2012.09.012 10.1007/s10544-013-9759-7 10.1109/LED.2010.2078484 10.1116/1.4935561 10.1016/S1369-8001(99)00022-0 10.1166/mex.2015.1247 10.1016/j.snb.2010.02.057 10.1088/0960-1317/17/3/014 10.1063/1.328019 10.1016/j.bios.2015.04.043 10.1016/S0925-4005(98)00131-2 10.1016/j.proeng.2014.11.544 10.1049/el:20030488 10.3390/s150613839 10.1109/LED.2012.2183851 10.1109/58.384444 10.1016/j.tsf.2011.04.174 10.1021/ac0504621 10.1016/S0956-5663(03)00257-4 10.1002/(SICI)1522-2683(20000101)21:1<27::AID-ELPS27>3.0.CO;2-C 10.3390/s140712658 |
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| Notes | Surface acoustic wave （SAW） devices have been widely used in different fields and will continue to be of great importance in the foreseeable future. These devices are compact, cost efficient, easy to fabricate, and have a high performance, among other advantages. SAW devices can work as filters, signal processing units, sensors and actuators. They can even work without batteries and operate under harsh environments. In this review, the operating principles of SAW sensors, including temperature sensors, pressure sensors, humidity sensors and biosensors, will be discussed. Several examples and related issues will be presented. Technological trends and future developments will also be discussed. 11-5781/TN surface acoustic wave; sensor; sensor application ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 23 |
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| References | Bower D (22) 44 88 Scherr H (16) 1996; 1 Nagaraju M B (57) Krishnamoorthy S (84) 89 Mohammad M A (96) 47 49 Grousset S (17) Trang H (48) Hartemann P (26) Uehara K (90) 2004; 1 Lee K (29) 2007; 17 Muller A (10) Liang B (60) Hao H C (79) Singh H (73) Kirsch P (85) 91 92 Wang L J (21) 93 94 51 95 52 53 54 12 13 14 15 Reindl L (45) 18 19 Campbell C (3) 1989 2 Pohl A (56) 1997; 1 5 7 8 9 61 62 63 20 64 65 23 67 Strutt J W (1) 1885; 17 24 Lukyanov D (27) 25 69 28 Campbell C K (32) 1998; 1 Shimizu Y (42) 1993; 76 Grousset S (55) Chang H (58) 70 71 72 30 Dixon B (59) 74 31 75 76 33 77 34 78 35 Morgan D (6) 2010 36 37 38 39 Cullen D E (50) Martin G (46) Sheng L (68) 2011; 22 Zhang G (11) 2004; 20 Campbell C (4) 1998 Čiplys D (66) 2010 80 81 82 83 40 41 86 43 87 |
| References_xml | – ident: 8 doi: 10.1016/j.sna.2013.08.021 – ident: 31 doi: 10.1109/JSEN.2006.884548 – ident: 35 doi: 10.1016/j.tibtech.2009.09.003 – ident: 70 doi: 10.1016/S0925-4005(00)00361-0 – ident: 89 doi: 10.1049/el.2009.2520 – ident: 81 doi: 10.1016/j.snb.2009.02.050 – ident: 94 doi: 10.1016/j.diamond.2008.01.082 – ident: 64 doi: 10.1186/1556-276X-7-363 – start-page: 2089 ident: 46 publication-title: Proceedings of the IEEE Ultrasonics Symposium – start-page: 935 ident: 45 publication-title: IEEE International Frequency Control Symposium and PDA Exhibition Jointly with the 17th European Frequency and Time Forum – ident: 43 doi: 10.1016/S0925-9635(02)00316-3 – ident: 19 doi: 10.1016/j.snb.2015.03.069 – ident: 2 doi: 10.1063/1.1754276 – year: 1989 ident: 3 publication-title: Surface acoustic wave devices and their signal processing applications – start-page: 40 ident: 48 publication-title: IEEE International Frequency Control Symposium and Joint with the 21st European Frequency and Time Forum – ident: 62 doi: 10.3390/s141120620 – ident: 57 publication-title: Joint Conference of the IEEE International Frequency Control Symposium & the European Frequency and Time Forum (FCS) – ident: 86 doi: 10.1021/ac010859e – start-page: 785 year: 2010 ident: 66 publication-title: IEEE Sensors – volume: 20 start-page: 63 issn: 0022-2461 year: 2004 ident: 11 publication-title: J Mater Sci – ident: 69 doi: 10.1016/S0925-4005(98)00026-4 – volume: 1 start-page: 203 issn: 0090-5607 year: 2004 ident: 90 publication-title: IEEE Ultrasonics Symposium – ident: 9 doi: 10.1109/JSEN.2015.2394776 – start-page: 18 ident: 27 publication-title: IEEE Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) – start-page: 1846 ident: 85 publication-title: Proceedings of the IEEE Ultrasonics Symposium – start-page: 152 ident: 26 publication-title: IEEE Ultrasonics Symposium – ident: 65 doi: 10.1038/srep07206 – ident: 75 doi: 10.1016/j.mee.2008.12.063 – ident: 93 doi: 10.1016/j.matlet.2011.09.003 – ident: 12 doi: 10.1109/22.899037 – ident: 28 doi: 10.1016/S0165-2125(02)00030-6 – ident: 40 doi: 10.1109/TUFFC.2012.2285 – ident: 88 doi: 10.1016/j.sna.2014.01.028 – start-page: 1 ident: 73 publication-title: IEEE 9th International Conference on Industrial and Information Systems (ICIIS) – volume: 1 start-page: 169 issn: 0090-5607 year: 1998 ident: 32 publication-title: IEEE Ultrasonics Symposium – ident: 49 doi: 10.4028/www.scientific.net/AMM.656.413 – volume: 1 start-page: 471 issn: 0090-5607 year: 1997 ident: 56 publication-title: IEEE Ultrasonics Symposium – ident: 72 doi: 10.1016/j.snb.2012.12.074 – ident: 54 doi: 10.1016/S0924-4247(98)80011-3 – ident: 77 doi: 10.1049/mnl.2012.0569 – ident: 80 doi: 10.1016/j.snb.2013.01.068 – ident: 47 doi: 10.1109/LED.2013.2283305 – ident: 20 doi: 10.1016/0925-4005(93)85197-I – ident: 74 doi: 10.1016/j.snb.2004.04.055 – ident: 30 doi: 10.1016/j.sna.2013.06.016 – start-page: 980 ident: 55 publication-title: IEEE European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC) – ident: 34 doi: 10.3390/s130606910 – start-page: 44 ident: 21 publication-title: IEEE Symposium on Piezoelectricity, Acoustic Waves, and Device Applications – start-page: 18.6 ident: 96 publication-title: Proceedings of IEEE International Electron Devices Meeting – ident: 53 doi: 10.1109/ULTSYM.1993.339458 – volume: 1 start-page: 347 year: 1996 ident: 16 publication-title: Proceedings of the IEEE Ultrasonics Symposium – ident: 24 doi: 10.1016/j.sna.2010.02.013 – ident: 23 doi: 10.1016/j.mee.2012.02.022 – ident: 25 doi: 10.1016/j.sna.2014.10.006 – ident: 5 doi: 10.1007/978-3-662-04223-6 – start-page: 980 ident: 17 publication-title: IEEE Joint European Frequency and Time Forum & International Frequency Control Symposium – ident: 36 doi: 10.1063/1.2234305 – ident: 51 doi: 10.1016/j.bios.2013.05.021 – volume: 22 start-page: 265504 issn: 0957-4484 year: 2011 ident: 68 publication-title: Nanotechnology doi: 10.1088/0957-4484/22/26/265504 – ident: 14 doi: 10.1016/j.proeng.2014.11.383 – ident: 58 publication-title: 5th International Conference on Information Engineering for Mechanics and Materials – ident: 67 doi: 10.1016/j.ijleo.2014.06.090 – ident: 76 doi: 10.1007/s10068-011-0194-3 – year: 2010 ident: 6 publication-title: Surface acoustic wave filters: with applications to electronic communications and signal processing – start-page: 2114 ident: 79 publication-title: IEEE 17th International Conference on Solid-State Sensors, Actuators and Microsystems – ident: 18 doi: 10.1016/0925-4005(94)87061-6 – ident: 15 doi: 10.1016/j.sna.2012.09.012 – ident: 61 doi: 10.1007/s10544-013-9759-7 – ident: 91 doi: 10.1109/LED.2010.2078484 – ident: 95 doi: 10.1116/1.4935561 – ident: 38 doi: 10.1016/S1369-8001(99)00022-0 – ident: 7 doi: 10.1166/mex.2015.1247 – start-page: 1 ident: 10 publication-title: IEEE International Microwave Symposium – year: 1998 ident: 4 publication-title: Surface acoustic wave devices for mobile and wireless communications – start-page: 2184 ident: 60 publication-title: 16th International IEEE Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS) – ident: 22 publication-title: IEEE 41st Annual Frequency Control Symposium – start-page: 374 ident: 59 publication-title: IEEE International Frequency Control Symposium and Exposition – ident: 71 doi: 10.1016/j.snb.2010.02.057 – volume: 17 start-page: 515 year: 2007 ident: 29 publication-title: J Micromechan Microeng doi: 10.1088/0960-1317/17/3/014 – ident: 44 doi: 10.1063/1.328019 – ident: 37 doi: 10.1016/j.bios.2015.04.043 – ident: 63 doi: 10.1016/S0925-4005(98)00131-2 – ident: 13 doi: 10.1016/j.proeng.2014.11.544 – ident: 39 doi: 10.1049/el:20030488 – ident: 52 doi: 10.3390/s150613839 – volume: 17 start-page: 4 issn: 0024-6115 year: 1885 ident: 1 publication-title: Proceedings of the London Mathematical Society – ident: 92 doi: 10.1109/LED.2012.2183851 – ident: 41 doi: 10.1109/58.384444 – ident: 33 doi: 10.1016/j.tsf.2011.04.174 – volume: 76 start-page: 129 year: 1993 ident: 42 publication-title: Transactions of the Institute of Electronics Information & Communication Engineers – ident: 83 doi: 10.1021/ac0504621 – ident: 82 doi: 10.1016/S0956-5663(03)00257-4 – start-page: 14 ident: 84 publication-title: IEEE Sensors Applications Symposium – ident: 87 doi: 10.1002/(SICI)1522-2683(20000101)21:1<27::AID-ELPS27>3.0.CO;2-C – start-page: 696 ident: 50 publication-title: IEEE Ultrasonics Symposium – ident: 78 doi: 10.3390/s140712658 |
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| Snippet | Surface acoustic wave （SAW） devices have been widely used in different fields and will continue to be of great importance in the foreseeable future. These... Surface acoustic wave (SAW) devices have been widely used in different fields and will continue to be of great importance in the foreseeable future. These... |
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| SubjectTerms | Biosensors Devices Humidity Pressure sensors Semiconductors Sensors Surface acoustic wave devices Surface acoustic waves 传感器应用 信号处理单元 压力传感器 声表面波器件 温度传感器 湿度传感器 生物传感器 表面声波器件 |
| Title | Surface acoustic wave devices for sensor applications |
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| Volume | 37 |
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