Quantitative analysis of the polishing performance of Wurtzite-SiC surface texture on surface quality and material removal rate - Do, Tan-Tai; Le, Phu-Cuong; Fang, Te-Hua (Tribology international, 2024)
Keywords: Material removal mechanism; Nano-textured; Polishing; Surface roughness; Polishing; Material removal mechanism; Surface roughness; Nano-textured