Sputtering pressure influence on growth morphology, surface roughness, and electrical resistivity for strong anisotropy beryllium film - 罗炳池 李恺 康晓丽 张吉强 何玉丹 罗江山 吴卫东 唐永建 (Chinese physics B, 2014)
Keywords: Anisotropy; Atomic properties; Beryllium; Diffusion; Electrical resistivity; Grains; Morphology; Sputtering; X射线衍射分析; 体电阻率; 压力; 各向异性; 生长形态; 直流磁控溅射; 薄膜; 表面粗糙度