Polishing-induced material attrition in surface-texturing AlN using a nanoscale polishing tool: An atomic-scale understanding - Le, Phu-Cuong; Do, Tan-Tai; Fang, Te-Hua; Lee, Chun-I. (Tribology international, 2024)
Keywords: Material removal mechanism; Nano-polishing; Nano-textured; Surface roughness; Material removal mechanism; Surface roughness; Nano-polishing; Nano-textured