Minkowski functional characterization and fractal analysis of surfaces of titanium nitride films

• Published in: Materials research express Vol. 6; no. 8; pp. 86463 - 86476
• Main Authors: Grayeli Korpi, Alireza, lu, tefan, Bramowicz, Miros aw, Arman, Ali, Kulesza, S awomir, Pszczolkowski, Bartosz, Jure ka, Stanislav, Mardani, Mohsen, Luna, Carlos, Balashabadi, Parvin, Rezaee, Sahar, Gopikishan, Sabavath
• Format: Journal Article
• Language: English
• Published: IOP Publishing 12.06.2019
• Subjects: atomic force microscopy (AFM); fractal analysis; ion beams sputtering; titanium nitride (TiN) thin films

The aim of this study is to gain a deeper understanding of the micromorphology characteristics of thin titanium nitride (TiN) films sputtered on glass substrates by using ion beam sputtering (IBS). For that purpose, TiN samples were deposited onto glass substrates from gas mixtures with different co...