Minkowski functional characterization and fractal analysis of surfaces of titanium nitride films - Grayeli Korpi, Alireza; lu, tefan; Bramowicz, Miros aw; Arman, Ali; Kulesza, S awomir; Pszczolkowski, Bartosz; Jure ka, Stanislav; Mardani, Mohsen; Luna, Carlos; Balashabadi, Parvin; Rezaee, Sahar; Gopikishan, Sabavath (Materials research express, 2019)
Keywords: atomic force microscopy (AFM); fractal analysis; ion beams sputtering; titanium nitride (TiN) thin films