Minkowski functional characterization and fractal analysis of surfaces of titanium nitride films
The aim of this study is to gain a deeper understanding of the micromorphology characteristics of thin titanium nitride (TiN) films sputtered on glass substrates by using ion beam sputtering (IBS). For that purpose, TiN samples were deposited onto glass substrates from gas mixtures with different co...
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| Published in | Materials research express Vol. 6; no. 8; pp. 86463 - 86476 |
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| Main Authors | , , , , , , , , , , , |
| Format | Journal Article |
| Language | English |
| Published |
IOP Publishing
12.06.2019
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| Subjects | |
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| Abstract | The aim of this study is to gain a deeper understanding of the micromorphology characteristics of thin titanium nitride (TiN) films sputtered on glass substrates by using ion beam sputtering (IBS). For that purpose, TiN samples were deposited onto glass substrates from gas mixtures with different contents of molecular nitrogen and argon atoms. Atomic force microscopy (AFM) was used to characterize the surface microtexture of obtained thin films at high magnification. The detailed analysis of AFM images using Minkowski functionals and fractal analysis reveals a significant effect of the preparation conditions on the surface features with non-monotonic dependences. Presented results suggest that non-classical spatial characteristics of the variability of the surface topography, including fractal dimension, corner frequency, roughness, and feature shape and size, can be tuned having control over the relative flow rates of the gas mixture during film deposition. |
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| AbstractList | The aim of this study is to gain a deeper understanding of the micromorphology characteristics of thin titanium nitride (TiN) films sputtered on glass substrates by using ion beam sputtering (IBS). For that purpose, TiN samples were deposited onto glass substrates from gas mixtures with different contents of molecular nitrogen and argon atoms. Atomic force microscopy (AFM) was used to characterize the surface microtexture of obtained thin films at high magnification. The detailed analysis of AFM images using Minkowski functionals and fractal analysis reveals a significant effect of the preparation conditions on the surface features with non-monotonic dependences. Presented results suggest that non-classical spatial characteristics of the variability of the surface topography, including fractal dimension, corner frequency, roughness, and feature shape and size, can be tuned having control over the relative flow rates of the gas mixture during film deposition. |
| Author | lu, tefan Balashabadi, Parvin Pszczolkowski, Bartosz Luna, Carlos Bramowicz, Miros aw Jure ka, Stanislav Mardani, Mohsen Kulesza, S awomir Gopikishan, Sabavath Arman, Ali Grayeli Korpi, Alireza Rezaee, Sahar |
| Author_xml | – sequence: 1 givenname: Alireza surname: Grayeli Korpi fullname: Grayeli Korpi, Alireza organization: Physics and Accelerators Research School, Nuclear Sciences and Technology Research Institute, Tehran, Iran – sequence: 2 givenname: tefan orcidid: 0000-0003-1311-7657 surname: lu fullname: lu, tefan organization: Technical University of Cluj-Napoca , The Directorate of Research, Development and Innovation Management (DMCDI), Constantin Daicoviciu St., no. 15, Cluj-Napoca, 400020, Cluj county, Romania – sequence: 3 givenname: Miros aw orcidid: 0000-0002-7716-544X surname: Bramowicz fullname: Bramowicz, Miros aw organization: University of Warmia and Mazury in Olsztyn , Faculty of Technical Sciences, Oczapowskiego 11, 10-719 Olsztyn, Poland – sequence: 4 givenname: Ali orcidid: 0000-0003-1246-0453 surname: Arman fullname: Arman, Ali organization: Vacuum Technology Research Group, ACECR, Sharif University Branch, Tehran, Iran – sequence: 5 givenname: S awomir orcidid: 0000-0003-2889-5611 surname: Kulesza fullname: Kulesza, S awomir organization: University of Warmia and Mazury in Olsztyn , Faculty of Mathematics and Computer Science, Sloneczna 54, 10-710 Olsztyn, Poland – sequence: 6 givenname: Bartosz surname: Pszczolkowski fullname: Pszczolkowski, Bartosz organization: University of Warmia and Mazury in Olsztyn , Faculty of Mathematics and Computer Science, Sloneczna 54, 10-710 Olsztyn, Poland – sequence: 7 givenname: Stanislav surname: Jure ka fullname: Jure ka, Stanislav organization: University of ilina , Faculty of Electrical Engineering, Institute of Aurel Stodola, Nálepku 1390, 031 01 Liptovský Mikuláš, Slovakia – sequence: 8 givenname: Mohsen surname: Mardani fullname: Mardani, Mohsen organization: Vacuum Technology Research Group, ACECR, Sharif University Branch, Tehran, Iran – sequence: 9 givenname: Carlos orcidid: 0000-0002-0149-9814 surname: Luna fullname: Luna, Carlos organization: Universidad Autónoma de Nuevo León (UANL), Facultad de Ciencias Físico Matemáticas (FCFM), Av. Universidad s/n, San Nicolás de los Garza, Nuevo León 66455, Mexico – sequence: 10 givenname: Parvin surname: Balashabadi fullname: Balashabadi, Parvin organization: Physics and Accelerators Research School, Nuclear Sciences and Technology Research Institute, Tehran, Iran – sequence: 11 givenname: Sahar orcidid: 0000-0001-5034-0810 surname: Rezaee fullname: Rezaee, Sahar email: saharrezaee593@ iauksh.ac.ir organization: Department of Physics, Kermanshah Branch, Islamic Azad University , Kermanshah, Iran – sequence: 12 givenname: Sabavath surname: Gopikishan fullname: Gopikishan, Sabavath organization: Institute of Aeronautical Engineering, Department of Physics, Hyderabad, Telangana, India |
| BookMark | eNp9kMtLAzEQxoMoWGvvHnPy5No8NunuUYovqHjRc5zNA9PuZkuyRetf764VEZEyhxm--b6B-Z2gw9AGi9AZJZeUFMWUEcEzKko6hYrJyh6g0Y90-Gs-RpOUloQQNiu5YHKEXh58WLVvaeWx2wTd-TZAjfUrRNCdjf4DBglDMNgNUr-E3rFNPuHW4bSJDrT9mjvfQfCbBgffRW8sdr5u0ik6clAnO_nuY_R8c_00v8sWj7f386tFpjmlXQZ0BlQ6LaTQDiRnjkvBDMuNIbKgRAtdurzSJauEMLziWrrKkr5YDiYXfIzI7q6ObUrROrWOvoG4VZSoAZIaKKiBgtpB6iPyT0T3Lwz_dhF8vS94sQv6dq2W7Sb2RNI--_k_9ia-K6kKRQqZS67WxvFPoP6L7g |
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| ContentType | Journal Article |
| Copyright | 2019 IOP Publishing Ltd |
| Copyright_xml | – notice: 2019 IOP Publishing Ltd |
| DBID | AAYXX CITATION |
| DOI | 10.1088/2053-1591/ab26be |
| DatabaseName | CrossRef |
| DatabaseTitle | CrossRef |
| DatabaseTitleList | |
| DeliveryMethod | fulltext_linktorsrc |
| DocumentTitleAlternate | Minkowski functional characterization and fractal analysis of surfaces of titanium nitride films |
| EISSN | 2053-1591 |
| ExternalDocumentID | 10_1088_2053_1591_ab26be mrxab26be |
| GroupedDBID | AAGCD AAJIO AATNI ABHWH ACGFS ACHIP AFYNE AKPSB ALMA_UNASSIGNED_HOLDINGS AOAED ASPBG ATQHT CEBXE CJUJL CRLBU EBS EJD GROUPED_DOAJ IIPPG IJHAN IOP IZVLO KOT M~E N5L O3W PJBAE RIN ROL RPA AAYXX ABJNI ADEQX CITATION |
| ID | FETCH-LOGICAL-c311t-a17a16fc565cfa632f3652d24dd06810c5c9f4bc92b55d3b3c6fbe0e0e24ad453 |
| IEDL.DBID | IOP |
| ISSN | 2053-1591 |
| IngestDate | Tue Jul 01 04:00:16 EDT 2025 Thu Apr 24 23:12:47 EDT 2025 Thu Jan 07 13:48:48 EST 2021 Wed Aug 21 03:41:46 EDT 2024 |
| IsPeerReviewed | true |
| IsScholarly | true |
| Issue | 8 |
| Language | English |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-LOGICAL-c311t-a17a16fc565cfa632f3652d24dd06810c5c9f4bc92b55d3b3c6fbe0e0e24ad453 |
| Notes | MRX-114692.R1 |
| ORCID | 0000-0003-1311-7657 0000-0001-5034-0810 0000-0003-1246-0453 0000-0003-2889-5611 0000-0002-0149-9814 0000-0002-7716-544X |
| PageCount | 14 |
| ParticipantIDs | iop_journals_10_1088_2053_1591_ab26be crossref_primary_10_1088_2053_1591_ab26be crossref_citationtrail_10_1088_2053_1591_ab26be |
| ProviderPackageCode | CITATION AAYXX |
| PublicationCentury | 2000 |
| PublicationDate | 20190612 |
| PublicationDateYYYYMMDD | 2019-06-12 |
| PublicationDate_xml | – month: 06 year: 2019 text: 20190612 day: 12 |
| PublicationDecade | 2010 |
| PublicationTitle | Materials research express |
| PublicationTitleAbbrev | MRX |
| PublicationTitleAlternate | Mater. Res. Express |
| PublicationYear | 2019 |
| Publisher | IOP Publishing |
| Publisher_xml | – name: IOP Publishing |
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| References_xml | – ident: 29 doi: 10.1016/j.apsusc.2013.12.132 – ident: 5 doi: 10.1007/s10854-018-0351-z – ident: 12 doi: 10.1116/1.1839895 – ident: 20 doi: 10.1515/msp-2015-0086 – ident: 10 doi: 10.1016/j.surfcoat.2014.12.018 – ident: 15 doi: 10.1016/0257-8972(91)90054-Z – ident: 22 doi: 10.1080/1023666X.2014.955400 – ident: 37 – ident: 16 doi: 10.1016/j.matchar.2007.08.017 – ident: 28 doi: 10.1063/1.4928695 – ident: 11 doi: 10.1016/j.surfcoat.2003.10.131 – volume: 37 start-page: 1095 issn: 0022-3727 year: 2004 ident: 9 publication-title: J. Phys. D: Appl. Phys. doi: 10.1088/0022-3727/37/7/023 – year: 2009 ident: 38 publication-title: ASME B46.1-2009, Surface Texture (Surface Roughness, Waviness and Lay) – year: 2015 ident: 2 publication-title: Micro and Nanoscale Characterization of Three-Dimensional Surfaces – ident: 32 doi: 10.1016/0043-1648(94)90128-7 – ident: 18 doi: 10.1007/s10894-011-9383-6 – ident: 24 doi: 10.1007/s10854-015-3628-5 – ident: 27 doi: 10.1149/2.039401jes – ident: 36 doi: 10.1364/AO.41.000154 – ident: 23 doi: 10.1016/j.optmat.2011.11.027 – year: 1998 ident: 7 – ident: 30 doi: 10.1039/C6RA28795F – ident: 14 doi: 10.1016/S0257-8972(01)01120-3 – ident: 31 doi: 10.1007/s10854-016-4965-8 – ident: 21 doi: 10.1007/s10854-016-5774-9 – ident: 26 doi: 10.1016/j.apsusc.2014.05.086 – volume: 5 issn: 2051-672X year: 2017 ident: 35 publication-title: Surf. Topogr.: Metrol. Prop. – ident: 4 doi: 10.1116/1.3701763 – ident: 19 doi: 10.1515/msp-2015-0010 – ident: 34 – ident: 1 doi: 10.1016/j.tsf.2012.07.066 – ident: 3 doi: 10.1111/j.1365-2842.2004.01382.x – ident: 25 doi: 10.1039/C6RA01791F – ident: 33 doi: 10.1016/0043-1648(77)90057-6 – ident: 6 doi: 10.1016/j.apsusc.2008.03.047 – ident: 17 doi: 10.1007/s10894-012-9510-z – ident: 39 doi: 10.3891/acta.chem.scand.29a-0563 – ident: 8 doi: 10.1007/s11082-016-0742-4 – ident: 13 doi: 10.1016/j.nimb.2004.01.159 – ident: 40 |
| SSID | ssj0002793526 |
| Score | 2.4100323 |
| Snippet | The aim of this study is to gain a deeper understanding of the micromorphology characteristics of thin titanium nitride (TiN) films sputtered on glass... |
| SourceID | crossref iop |
| SourceType | Enrichment Source Index Database Publisher |
| StartPage | 86463 |
| SubjectTerms | atomic force microscopy (AFM) fractal analysis ion beams sputtering titanium nitride (TiN) thin films |
| Title | Minkowski functional characterization and fractal analysis of surfaces of titanium nitride films |
| URI | https://iopscience.iop.org/article/10.1088/2053-1591/ab26be |
| Volume | 6 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV3NS8MwFA9OL178QMVvc9CDh8zmcy2eRBQRph4ceBBikzQw5rrRbSj-9b6sXVGRIdJL2r604TXNey95v18QOuaxE4lKJAlUKEQ4oYjxkSTMqahleZREIuCd23fqpiNun-TTAjqvsTCDYTX0N6FYEgWXKqwS4mII1yUnYIXpWWqYMlkDLfEYDGdA790_1BMsDHqeZLOlyd8qfjNFDXjdF8tyvYqeZ20qE0p6zcnYNO3HD7rGfzZ6Da1UHie-KEXX0UKWb6CXNsSgg7dRr4uDZSsnBLGt2ZtLcCZOc4d9uAQ304q-BA88Hk0KH3K5Qjmg1PLupI9hcCi6LsO--9ofbaLO9dXj5Q2pNlsgllM6JiltpVR5Cw6e9anizHMlmWPCuShwlllpEy-MTZiR0nHDrfImi-BgInVC8i20mA_ybBth02IevDqvHDUiY85klKoohjNvWi4RO-hspndtKybysCHGq56uiMexDtrSQVu61NYOOq1rDEsWjjmyJ_ARdPUrjubIHX2T6xfvWulYQ4wnFNdD53f_-KQ9tAxuVCBzIJTto8VxMckOwFUZm8Npl_wEbWfk0w |
| linkProvider | IOP Publishing |
| linkToPdf | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMw1V1LT-MwELZYkNBelkWAYJcFH-DAwW38bHLYwwq24g0HkLiZ-CVV0LRqWrHwp_av8JMYk7QChBAXDigXJ3Ese8aZhz3zGaENnjqRqUySCIVChBOKmJBIwpxKWpYnWSJivvPRsdo9F_sX8mIK_Z_kwvT6tehvQLECCq5IWAfEpeCuS05AC9Nmbpgyvtl3oY6qPPC3N-Czlb_3doDBm4y1_55t75L6WAFiOaVDktNWTlWwYMrYkCvOAleSOSacSyI6l5U2C8LYjBkpHTfcqmB8AhcTuRPxmAiQ-TOSg66OGYMnp5NFHQazXbLxduhrnX2m_r7AEJ9os_Ycuh_ToQpiuWqMhqZh715ARH4iQn1H32rLGv-pujePpnyxgC6PwNfu3ZRXHRw1eLXwie0EpbpKQsV54XCIj-BlXsO04F7A5WgQYsxaLMdsvKIz6mIQgoOO8zh0rrvlIjr_kEEtoemiV_hlhE2LBbBeg3LUCM-c8ZSqJIW7YFouEyuoOea1tjXiejz441o_7vynqY4c0pFDuuLQCtqafNGv0EbeqLsJjNe1yCnfqLf-rF538E8rnWrwZYXiGubEj3e2tI5mT3fa-nDv-OAn-gqWY8SvIJStounhYOR_gXU2NGuPfwRGlx89sx4Aja5Fgw |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Minkowski+functional+characterization+and+fractal+analysis+of+surfaces+of+titanium+nitride+films&rft.jtitle=Materials+research+express&rft.au=Grayeli+Korpi%2C+Alireza&rft.au=lu%2C+tefan&rft.au=Bramowicz%2C+Miros+aw&rft.au=Arman%2C+Ali&rft.date=2019-06-12&rft.pub=IOP+Publishing&rft.eissn=2053-1591&rft.volume=6&rft.issue=8&rft_id=info:doi/10.1088%2F2053-1591%2Fab26be&rft.externalDocID=mrxab26be |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=2053-1591&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=2053-1591&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=2053-1591&client=summon |