Synergetic Effect of 1,2,4-triazole and Glycine on Chemical Mechanical Planarization of Aluminum at Low Polishing Pressure in an Eco-Friendly Slurry

• Published in: ECS journal of solid state science and technology Vol. 9; no. 3; pp. 34003 - 34011
• Main Authors: Sun, Ping, Wang, Yongguang, Liu, Ping, Zhu, Yuguang, Zhao, Yongwu, Zhao, Dong, Deng, Hui
• Format: Journal Article
• Language: English
• Published: IOP Publishing 28.02.2020

In this paper, glycine and 1,2,4-triazole (TAZ) are used as eco-friendly additives to compensate the decrease in removal rate owing to the low polishing pressure in chemical mechanical planarization (CMP) of aluminum (Al) at near-neutral pH value. It demonstrated that the synergetic effect of glycin...