Analysis of coupled motion constraints and coupling errors for a six-axis magnetic levitation stage
This paper presents the coupled motion constraints and coupling errors analysis of a magnetic levitation stage, which are two aspects of the coupling characteristics of magnetic levitation stage caused by force coupling. Aiming at the motion constraint coupling problem, this paper proposes a motion...
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Published in | Proceedings of the Institution of Mechanical Engineers. Part C, Journal of mechanical engineering science Vol. 234; no. 11; pp. 2097 - 2112 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
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London, England
SAGE Publications
01.06.2020
SAGE PUBLICATIONS, INC |
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Abstract | This paper presents the coupled motion constraints and coupling errors analysis of a magnetic levitation stage, which are two aspects of the coupling characteristics of magnetic levitation stage caused by force coupling. Aiming at the motion constraint coupling problem, this paper proposes a motion constrain method based on the force distribution matrix of the magnetic levitation stage. By this method, the motion constraint intervals without input saturation for single-degree-of-freedom motion, in-plane motion, and out-of-plane motion of magnetic levitation stage are established. When used for motion control, these constraints can provide the motion constraint specifications for the magnetic levitation stage, avoid the input saturation problem caused by the actuation force coupling, and provide a theoretical basis for magnetic levitation stage trajectory planning. Aiming at reducing the coupling error, this paper proposes a strategy to evaluate the coupling degree of the magnetic levitation stage actuation force by the condition number of the actuation force transfer matrix and the singular value of the force and torque error matrix. On this basis, the force and torque coupling errors caused by the translational and rotational movements of the magnetic levitation stage are studied, and the mechanism and characteristics of the coupling error between the interaction of translational and rotational movements are revealed. Based on the obtained results, the decoupling algorithm of the magnetic levitation stage is designed. Experimental results of the normalized step response demonstrate that the linearity of the magnetic levitation stage will be destroyed by the current saturation, and coupling error can also be introduced. Therefore, it is necessary to study the motion constrain strategy to provide comprehensive criteria for the trajectory planning and controller design. Experimental results of six-axis coupling error analysis show that the coupling error of x- and y-axes translational movement is reduced by 69.34% and 69.60%, respectively. This method provides a theoretical basis for the decoupling of the magnetic levitation stage and reducing the coupling error. |
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AbstractList | This paper presents the coupled motion constraints and coupling errors analysis of a magnetic levitation stage, which are two aspects of the coupling characteristics of magnetic levitation stage caused by force coupling. Aiming at the motion constraint coupling problem, this paper proposes a motion constrain method based on the force distribution matrix of the magnetic levitation stage. By this method, the motion constraint intervals without input saturation for single-degree-of-freedom motion, in-plane motion, and out-of-plane motion of magnetic levitation stage are established. When used for motion control, these constraints can provide the motion constraint specifications for the magnetic levitation stage, avoid the input saturation problem caused by the actuation force coupling, and provide a theoretical basis for magnetic levitation stage trajectory planning. Aiming at reducing the coupling error, this paper proposes a strategy to evaluate the coupling degree of the magnetic levitation stage actuation force by the condition number of the actuation force transfer matrix and the singular value of the force and torque error matrix. On this basis, the force and torque coupling errors caused by the translational and rotational movements of the magnetic levitation stage are studied, and the mechanism and characteristics of the coupling error between the interaction of translational and rotational movements are revealed. Based on the obtained results, the decoupling algorithm of the magnetic levitation stage is designed. Experimental results of the normalized step response demonstrate that the linearity of the magnetic levitation stage will be destroyed by the current saturation, and coupling error can also be introduced. Therefore, it is necessary to study the motion constrain strategy to provide comprehensive criteria for the trajectory planning and controller design. Experimental results of six-axis coupling error analysis show that the coupling error of x- and y-axes translational movement is reduced by 69.34% and 69.60%, respectively. This method provides a theoretical basis for the decoupling of the magnetic levitation stage and reducing the coupling error. |
ArticleNumber | 2097 |
Author | Sheng, Xiaochao Tao, Tao Menq, Chia-Hsiang |
Author_xml | – sequence: 1 givenname: Xiaochao surname: Sheng fullname: Sheng, Xiaochao – sequence: 2 givenname: Chia-Hsiang surname: Menq fullname: Menq, Chia-Hsiang – sequence: 3 givenname: Tao orcidid: 0000-0002-7333-7953 surname: Tao fullname: Tao, Tao email: taotao@mail.xjtu.edu.cn |
BookMark | eNp9UMtKAzEUDVLBtrp3GXA9mszkMVmW4gsKbnQ9ZDJJSZkmNUml_XszTkEo6N1cLufBPWcGJs47DcAtRvcYc_6ABCUEsbJEAlWckQswLRHBRSnqagKmA1wM-BWYxbhBeUpGp0AtnOyP0UboDVR-v-t1B7c-We_y6WIK0roUoXTdCFu3hjoEHyI0PkAJoz0U8pANtnLtdLIK9vrLJvljEZNc62twaWQf9c1pz8HH0-P78qVYvT2_LherQlVIpKLljDJSmVqxjiuichKuRIVbxbhQlAmjaS1xa5BBmLWmlkJVXNeIyq4lqkNzcDf67oL_3OuYmo3fh5wvNiVBFBMqKpRZaGSp4GMM2jS7YLcyHBuMmqHK5rzKLGFnEnUKONTT_ycsRmHMNfx-8yf_G94Ehv0 |
CitedBy_id | crossref_primary_10_1016_j_ymssp_2021_108478 |
Cites_doi | 10.1137/1.9780898719512 10.1109/TCST.2013.2245668 10.1109/3516.990889 10.1109/TIA.2005.853374 10.1016/S0141-6359(98)00009-9 10.1016/j.cirp.2012.03.145 10.1109/TRO.2007.892232 10.1109/TIE.2016.2562606 10.1016/j.jsv.2010.03.003 10.1063/1.2776011 10.1177/0954406212447225 10.1016/j.jsv.2015.07.013 10.1002/asjc.1263 10.1177/0959651817750520 10.1177/0954405413497196 10.1109/TMECH.2004.842219 10.1177/0959651812445860 10.1098/rspa.1988.0036 10.1088/0964-1726/23/2/025030 10.1115/1.1978906 10.1109/TMECH.2012.2194161 10.1109/TMECH.2004.828648 10.1002/asjc.92 10.1109/TMECH.2016.2621108 10.1109/TMAG.2006.875839 |
ContentType | Journal Article |
Copyright | IMechE 2020 |
Copyright_xml | – notice: IMechE 2020 |
DBID | AAYXX CITATION 7TB 8FD F28 FR3 |
DOI | 10.1177/0954406220903764 |
DatabaseName | CrossRef Mechanical & Transportation Engineering Abstracts Technology Research Database ANTE: Abstracts in New Technology & Engineering Engineering Research Database |
DatabaseTitle | CrossRef Engineering Research Database Technology Research Database Mechanical & Transportation Engineering Abstracts ANTE: Abstracts in New Technology & Engineering |
DatabaseTitleList | CrossRef Engineering Research Database |
DeliveryMethod | no_fulltext_linktorsrc |
Discipline | Engineering |
EISSN | 2041-2983 |
EndPage | 2112 |
ExternalDocumentID | 10_1177_0954406220903764 n/a 10.1177_0954406220903764 |
GroupedDBID | -MK -TN -~X .DC 0R~ 29P 3V. 4.4 6TJ 88I 8AF 8AO 8FE 8FG 8R4 8R5 8WZ A6W AAFNC AALXP AAOTM AAPFT AAQDB AAYJJ ABJCF ABUBZ ABUWG ACGFS ACGOD ACIWK ACKIV ADQAE AEDFJ AEWDL AFKRA AFKRG AIDUJ AIOMO AJCXD AJUZI AKDDG ALMA_UNASSIGNED_HOLDINGS ARTOV ASPBG AVWKF AZFZN AZQEC BENPR BGLVJ BPACV BPHCQ CAG CCPQU COF DWQXO EBS EJD FEDTE FHBDP G8K GNUQQ HCIFZ HVGLF HZ~ I6U IL9 J8X L6V L7B M2P M2Q M4V M7S O9- P.B PQQKQ PRI PROAC PTHSS PZZ Q1R Q2X Q7S SC5 SCNPE SFC UCJ XSW ~33 AAYXX CITATION H13 7TB 8FD F28 FR3 |
ID | FETCH-LOGICAL-c309t-b765643f8c6d7c4c2097c931bc679c569fe58a1bf0f016bf8a9c37e805adb4cd0 |
ISSN | 0954-4062 |
IngestDate | Thu Oct 10 16:51:15 EDT 2024 Wed Oct 09 16:50:28 EDT 2024 Tue Jul 23 14:13:37 EDT 2024 Tue Jul 16 20:48:09 EDT 2024 |
IsPeerReviewed | true |
IsScholarly | true |
Issue | 11 |
Keywords | coupled motion constraints Coupling coupling error magnetic levitation stage force distribution |
Language | English |
LinkModel | OpenURL |
MergedId | FETCHMERGED-LOGICAL-c309t-b765643f8c6d7c4c2097c931bc679c569fe58a1bf0f016bf8a9c37e805adb4cd0 |
ORCID | 0000-0002-7333-7953 |
PQID | 2405145930 |
PQPubID | 36167 |
PageCount | 16 |
ParticipantIDs | proquest_journals_2405145930 crossref_primary_10_1177_0954406220903764 crossref_citationtrail_10_1177_0954406220903764 sage_journals_10_1177_0954406220903764 |
PublicationCentury | 2000 |
PublicationDate | 20200600 2020-06-00 20200601 |
PublicationDateYYYYMMDD | 2020-06-01 |
PublicationDate_xml | – month: 6 year: 2020 text: 20200600 |
PublicationDecade | 2020 |
PublicationPlace | London, England |
PublicationPlace_xml | – name: London, England – name: London |
PublicationTitle | Proceedings of the Institution of Mechanical Engineers. Part C, Journal of mechanical engineering science |
PublicationYear | 2020 |
Publisher | SAGE Publications SAGE PUBLICATIONS, INC |
Publisher_xml | – name: SAGE Publications – name: SAGE PUBLICATIONS, INC |
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SSID | ssj0000265 |
Score | 2.3008575 |
Snippet | This paper presents the coupled motion constraints and coupling errors analysis of a magnetic levitation stage, which are two aspects of the coupling... |
SourceID | proquest crossref sage |
SourceType | Aggregation Database Index Database Publisher |
StartPage | 2097 |
SubjectTerms | Actuation Algorithms Control systems design Coupling Decoupling Error analysis Force distribution Linearity Magnetic levitation Motion control Railroad transportation Saturation Step response Stress concentration Torque Trajectory control Trajectory planning Transfer matrices |
Title | Analysis of coupled motion constraints and coupling errors for a six-axis magnetic levitation stage |
URI | https://journals.sagepub.com/doi/full/10.1177/0954406220903764 https://www.proquest.com/docview/2405145930 |
Volume | 234 |
hasFullText | |
inHoldings | |
isFullTextHit | |
isPrint | |
link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV3Na9swFBfpdtkOY58sWwc6jMEIbmVbtqPjKBth0LFDCrkZSZa6QGtnsQNlf2f_oD592W5oR7eLMcqTHOv9LL339D4Q-ljl2mTF4pFJtRlRpuOIcaki2JwSHTOhY2Jih09_5Isz-n2VrSaT65HX0q4TR_LPnXEl_8NVaAO-mijZf-BsPyg0wD3wF67AYbg-iMfjjCKy2W0uQHp0ZXmMN3lryz90rQ9d221s5Lnabk19Hes8OWvXVxG_ggEu-XltwhlnJtrcOyCC3HjbUehnv9m1wbUg-Bp4sfNUmUBiy_eQ6LA9Ail1281OnK2-F38vB1I15ESc-R25N_z8Um4xWq15Ax2aHiCq_u3cBdY8WphI0PPBCGHNv0tP7E0aCRlcr0ZnafdZLSmovH4BV7YtITSOEubq4YRFPfEmUo_eeLxGE-cR7Pd70ICTu_cSe5ptnmgemBiDVuEyru9l6PbE5T7pATqwyfmCXJDYwqb9KwyH5sf7PW8LSYPmM3I2tPLP8jl65jmHvzgUvkATVb9ET0fpLF8hGfCIG409HrHDIx7hEQMeccAjdnjEgEfMccAjDnjEAx6xxeNrdPbt6_JkEfkiHpFMCesiUYDGQFM9l3lVSCrN7EuWxkLmBZNZzrTK5jwWmmjQPoSecybTQs1JxitBZUXeoEd1U6u3CJOcCJ3knCqRUEErYXR3ENAlUUylOp6i4zBrpfT_zbzZRRmHpPZ78zxFn_seG5fd5S-0h4ERpV8D2hLkYdA4MpaSKfpkmDP8dN847x5K-B49GT6OQ_RYA7H6ACJwJ24AWAesiw |
link.rule.ids | 786 |
openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Analysis+of+coupled+motion+constraints+and+coupling+errors+for+a+six-axis+magnetic+levitation+stage&rft.jtitle=Proceedings+of+the+Institution+of+Mechanical+Engineers.+Part+C%2C+Journal+of+mechanical+engineering+science&rft.au=Sheng%2C+Xiaochao&rft.au=Menq%2C+Chia-Hsiang&rft.au=Tao%2C+Tao&rft.date=2020-06-01&rft.pub=SAGE+Publications&rft.issn=0954-4062&rft.eissn=2041-2983&rft.volume=234&rft.issue=11&rft.spage=2097&rft.epage=2112&rft_id=info:doi/10.1177%2F0954406220903764&rft.externalDocID=10.1177_0954406220903764 |
thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0954-4062&client=summon |
thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0954-4062&client=summon |
thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0954-4062&client=summon |