An Improved Fabrication Method for Van Der Pauw Mobility Measurement on GaN Epitaxy on Conductive and Non-Conductive Substrates

• Published in: Coatings (Basel) Vol. 15; no. 4; p. 491
• Main Authors: Qiao, Dan, Ni, Xianfeng, Fan, Qian, Gu, Xing
• Format: Journal Article
• Language: English
• Published: Basel MDPI AG 20.04.2025
• Subjects: Annealing; Carbides; Carrier density; Charged particles; Comparative analysis; Contact resistance; Electric properties; Electrodes; Electromagnetism; Electron mobility; Epitaxy; Etching; Gallium nitrides; Hall effect; High temperature; Industrial applications; Liquors; Magnetic fields; Majority carriers; Measurement; Methods; Organic chemicals; Production processes; Reproducibility; Sapphire; Semiconductors; Silicon carbide; Silicon substrates
• ISSN: 2079-6412; 2079-6412
• DOI: 10.3390/coatings15040491

A novel empirical method for fabricating Van der Pauw Hall test samples on GaN epitaxy is proposed and tested, which enables rapid preparation of Van der Pauw Hall test samples on both conductive and non-conductive substrates. Compared to traditional Van der Pauw Hall sample preparation, this approa...