Evolution of TiAlSi thin film coatings under varying target power in DC magnetron sputtering - Wambua, Job; Mwema, Fredrick; Zoppi, Guillaume; Woo, Wai-Lok; Akinlabi, Esther (Proceedings of the Institution of Mechanical Engineers. Part L, Journal of materials, design and applications, 2025)
Keywords: target power; deposition; nucleation; DC magnetron sputtering; thin films