Pulsed laser deposition of high-transparency molybdenum oxide thin films

• Published in: Vacuum Vol. 194; p. 110613
• Main Authors: Holovský, Jakub, Horynová, Eva, Horák, Lukáš, Ridzoňová, Katarína, Remeš, Zdeněk, Landová, Lucie, Sharma, Rupendra Kumar
• Format: Journal Article
• Language: English
• Published: Elsevier Ltd 01.12.2021
• Subjects: Molybdenum oxide; Photothermal deflection spectroscopy; Pulsed laser deposition; Spectral ellipsometry; X-ray diffraction; X-ray diffraction; Photothermal deflection spectroscopy; Molybdenum oxide; Pulsed laser deposition; Spectral ellipsometry

Molybdenum oxide is an intensively studied material, thanks to its high bandgap, high work function, and potentially also photochromism, plasmonic properties, and layered structure. In this contribution, we employ Pulsed Laser Deposition (PLD) from stoichiometric MoO3 and metal Mo target at temperat...