Characteristics of a non-Maxwellian electron energy distribution in a low-pressure argon plasma

• Published in: Journal of the Korean Physical Society Vol. 64; no. 12; pp. 1819 - 1827
• Main Authors: Park, Seolhye, Choe, Jae-Myung, Roh, Hyun-Joon, Kim, Gon-Ho
• Format: Journal Article
• Language: English
• Published: Seoul The Korean Physical Society 01.06.2014; 한국물리학회
• Subjects: Mathematical and Computational Physics; Particle and Nuclear Physics; Physics; Physics and Astronomy; Theoretical; 물리학; Metastable; EEDF; OES; Non-Maxwellian; Argon plasma; Stepwise ionization

The generality of the non-Maxwellian electron energy distribution function (EEDF) is demonstrated by using optical emission spectroscopy (OES) and Langmuir probe measurements in inductively- and capacitively-coupled low-pressure argon plasmas to analyze the shape factor of the EEDF. To measure the s...