Ultrathin epitaxial NbNx film deposited by PEALD method on C-plane sapphire: Growth, structure and superconducting properties

• Published in: Applied surface science Vol. 612; p. 155697
• Main Authors: Shibalov, M.V., Sirotina, A.P., Pershina, E.A., Martovitskii, V.P., Shibalova, A.A., Mumlyakov, A.M., Trofimov, I.V., Timofeeva, E.R., Porokhov, N.V., Zenova, E.V., Tarkhov, M.A.
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.03.2023
• Subjects: Atomic layer depositon; Coherence length; Critical current density; Epitaxy; Niobuim nitride; Twins; Critical current density; Coherence length; Atomic layer depositon; Twins; Epitaxy; Niobuim nitride

Here we report on the results of obtaining and study of epitaxial ultrathin superconductive films of niobium nitride (NbNx) grown on a C-plane sapphire substrate. The films were deposited from the TBTDEN metal-organic precursor using the plasma-enhanced atomic layer deposition (PEALD) technique at 3...