APA (7th ed.) Citation

Shibalov, M., Sirotina, A., Pershina, E., Martovitskii, V., Shibalova, A., Mumlyakov, A., . . . Tarkhov, M. (2023). Ultrathin epitaxial NbNx film deposited by PEALD method on C-plane sapphire: Growth, structure and superconducting properties. Applied surface science, 612, 155697. https://doi.org/10.1016/j.apsusc.2022.155697

Chicago Style (17th ed.) Citation

Shibalov, M.V, et al. "Ultrathin Epitaxial NbNx Film Deposited by PEALD Method on C-plane Sapphire: Growth, Structure and Superconducting Properties." Applied Surface Science 612 (2023): 155697. https://doi.org/10.1016/j.apsusc.2022.155697.

MLA (9th ed.) Citation

Shibalov, M.V, et al. "Ultrathin Epitaxial NbNx Film Deposited by PEALD Method on C-plane Sapphire: Growth, Structure and Superconducting Properties." Applied Surface Science, vol. 612, 2023, p. 155697, https://doi.org/10.1016/j.apsusc.2022.155697.