Grain-boundary/interface structures and scatterings of ruthenium and molybdenum metallization for low-resistance interconnects - Chen, Yu-Lin; Fang, Yi-Ying; Lu, Ming-Yen; Keng, Pei Yuin; Chang, Shou-Yi (Applied surface science, 2023)
Keywords: FS-MS model; Grain boundary; Interconnect; Interface scattering; Metallization; Interconnect; FS-MS model; Metallization; Interface scattering; Grain boundary