Application of Novel Ultrasonic Cleaning Equipment Using Waveguide mode for Post-Chemical-Mechanical-Planarization Cleaning

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 48; no. 7; p. 7
Main Authors Suzuki, Kazunari, Han, Ki, Okano, Shoichi, Soejima, Jyunichiro, Koike, Yoshikazu
Format Journal Article
LanguageEnglish
Published 01.07.2009
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.48.07GM04