Samarium-Doped Ceria Nanospheres Prepared via Solvothermal Method and the Chemical Mechanical Polishing Properties - Wang, Zhenyang; Wang, Tongqing; Lu, Xinchun (Electronic materials letters, 2025)
Keywords: Cerium oxides; Characterization and Evaluation of Materials; Chemical-mechanical polishing; Chemistry and Materials Science; Condensed Matter Physics; Dielectrics; Doping; Material removal rate (machining); Materials Science; Nanospheres; Nanotechnology; Nanotechnology and Microengineering; Optical and Electronic Materials; Original Article– Nanomaterials; Samarium; Silicon nitride; Silicon oxides; 전자/정보통신공학; Samarium-doped ceria; Chemical mechanical polishing; Selection ratio; Ceria nanosphere