Observation of the Structure of Tungsten Films Prepared by MOCVD

• Published in: Plasma science & technology Vol. 15; no. 9; pp. 955 - 960
• Main Author: 张小锋 刘维良 于磊 李玉杰 郭双全
• Format: Journal Article
• Language: English
• Published: 01.09.2013
• Subjects: Alloy steels; Argon; Bonding; Carbon; Density; Martensitic stainless steels; Microstructure; MOCVD; Structural steels; Tungsten; 化学气相沉积; 有机金属; 粘结性能; 结构观察; 薄膜制备; 钨薄膜; 铬锆铜合金

The tungsten films with ultra microstructure on CuCrZr alloy and China Low Acti- vation Martensitic （CLAM） steel have been prepared by metal organic chemical vapor deposition （MOCVD）. The films were produced by pyrolysing the tungsten hexacarbonyl at air or argon atmosphere. When formed at or below...