Observation of the Structure of Tungsten Films Prepared by MOCVD - 张小锋 刘维良 于磊 李玉杰 郭双全 (Plasma science & technology, 2013)
Keywords: Alloy steels; Argon; Bonding; Carbon; Density; Martensitic stainless steels; Microstructure; MOCVD; Structural steels; Tungsten; 化学气相沉积; 有机金属; 粘结性能; 结构观察; 薄膜制备; 钨薄膜; 铬锆铜合金