Correlation of interface chemistry to electrical properties of metal contacts on diamond

• Published in: Diamond and related materials Vol. 2; no. 5; pp. 963 - 969
• Main Authors: Tachibana, T., Glass, J.T.
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 13.04.1993

Three different metals (Au, Al and Ti) were deposited on polycrystalline diamond films. The effects of post-deposition annealing and pre-deposition Ar + sputtering were examined. Au and Al did not chemically interact with diamond and formed rectifying contacts on the as-grown surface. The non-reacti...