Project of the compact superconducting storage ring Siberia-SM

In the last decade researches dealing with the creation of technology for X-ray lithography and for appropriate production equipment have been performed in many countries. The basic aim of these works is to provide a mass production of inexpensive devices with submicron structures (0.7-0.1 μm). Brin...

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Published inNuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment Vol. 282; no. 2; pp. 386 - 389
Main Authors Anashin, V.V., Arbuzov, V.S., Blinov, G.A., Veshcherevich, V.G., Vobly, P.D., Gorniker, E.I., Zinevich, N.I., Zinin, E.I., Zubkov, N.I., Kiselev, V.A., Kollerov, E.P., Kulipanov, G.N., Matveev, Yu.G., Medvedko, A.S., Mezentsev, N.A., Morgunov, L.G., Petrov, V.M., Petrov, S.P., Repkov, V.V., Roenko, V.A., Skrinsky, A.N., Sukhanov, S.V., Tokarev, Yu.I., Trakhtenberg, E.M.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 10.10.1989
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Summary:In the last decade researches dealing with the creation of technology for X-ray lithography and for appropriate production equipment have been performed in many countries. The basic aim of these works is to provide a mass production of inexpensive devices with submicron structures (0.7-0.1 μm). Bringing X-ray lithographic technology into commercial practice necessitates to design and build a dedicated SR source for the electronic industry. The use of superconducting bending magnets with 40–70 kG field strength enables the storage ring circumference to be reduced by a factor of 2–5 and the injection energy by a factor of 3—4 as compared to the conventional designs of storage rings. In the present paper we consider a storage ring which was designed for a maximum energy of 600 MeV, with 60 kG field strength in its bending magnets and 10 m circumference. The critical SR wavelength is 8.6 Å. The electrons are injected into the storage ring at 50–60 MeV and the maximum stored current is assumed to be equal to 0.3 A.
ISSN:0168-9002
1872-9576
DOI:10.1016/0168-9002(89)90007-7