Porosity and roughness determination of porous silicon thin films by genetic algorithms

• Published in: Optik (Stuttgart) Vol. 173; pp. 271 - 278
• Main Authors: Ramirez-Gutierrez, C.F., Castaño-Yepes, J.D., Rodriguez-Garcia, M.E.
• Format: Journal Article
• Language: English
• Published: Elsevier GmbH 01.11.2018
• Subjects: Effective medium approximation; Optical admittance; Optimization; Reflectance; Refractive index; Optical admittance; Effective medium approximation; Refractive index; Optimization; Reflectance

The problem of determining the porous silicon (PSi) optical constants, thickness, porosity, and surface quality using just reflectance data is board employing evolutionary algorithms. The reflectance measurements were carried out of PSi films over crystalline silicon (c-Si) substrate, and the fittin...