Ferroelectric [HfO 2 /ZrO 2 ] Superlattices with Enhanced Polarization, Tailored Coercive Field, and Improved High Temperature Reliability - Lehninger, David; Prabhu, Aditya; Sünbül, Ayse; Ali, Tarek; Schöne, Fred; Kämpfe, Thomas; Biedermann, Kati; Roy, Lisa; Seidel, Konrad; Lederer, Maximilian; Eng, Lukas M. (Advanced Physics Research, 2023)
Keywords: coercive fields; Coercivity; Dopants; Electric fields; Ferroelectric materials; Ferroelectricity; Ferroelectrics; Field effect transistors; Grain size; Hafnium oxide; hafnium zirconium oxide; High temperature; nanolaminates; Parameters; Periodic structures; Polarization; Random access memory; Semiconductor devices; Silicon wafers; Solid solutions; Superlattices; System reliability; Thickness; Zirconium dioxide