Highly uniform switching of HfO2−x based RRAM achieved through Ar plasma treatment for low power and multilevel storage - Qi, Meng; Tao, Ye; Wang, Zhongqiang; Xu, Haiyang; Zhao, Xiaoning; Liu, Weizhen; Ma, Jiangang; Liu, Yichun (Applied surface science, 2018)
Keywords: Low power consumption; Multilevel storage; RRAM; Surface plasma treatment; Multilevel storage; Surface plasma treatment; RRAM; Low power consumption