High-sensitivity Rutherford backscattering spectrometry employing an analyzing magnet and silicon strip detector

• Published in: Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Vol. 439; pp. 59 - 63
• Main Authors: Laricchiuta, G., Vandervorst, W., Meersschaut, J.
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 15.01.2019
• Subjects: Limit-of-detection; Rutherford backscattering spectrometry; Rutherford backscattering spectrometry; Limit-of-detection

Rutherford backscattering spectrometry (RBS) is an analysis method to quantify reference free the atomic areal density of a thin film, in particular sensitive to those cases where the elements of the film are heavier than the substrate. The ultimate sensitivity is determined by the ratio between the...