Fabrication and performance of a micromachined 3-D solenoid inductor

A high-Q and fres (self-resonant frequency)solenoid inductor was fabricated by using the microelectromechanical systems(MEMS) technology with air-core structure. This inductor has an air core and an electroplated copper coil to reduce the series resistance, and the solenoid structure with laterally...

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Published inMicroelectronics Vol. 37; no. 9; pp. 948 - 951
Main Authors Fang, Dong-Ming, Wang, Xi-Ning, Zhou, Yong, Zhao, Xiao-Lin
Format Journal Article
LanguageEnglish
Published Elsevier Ltd 01.09.2006
Subjects
3-D
Quality factor
RF MEMS
Solenoid inductor
3-D
RF MEMS
Quality factor
Solenoid inductor
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Abstract A high-Q and fres (self-resonant frequency)solenoid inductor was fabricated by using the microelectromechanical systems(MEMS) technology with air-core structure. This inductor has an air core and an electroplated copper coil to reduce the series resistance, and the solenoid structure with laterally laid out structure saves the chip area significantly. The measurement results show that this inductor has high Q-factor and stable inductance over wide range of operating frequency. The maximum Q-factor of this inductor is 38 and the inductance is 1.78 nH at 5GHz with an air core of 45μm. Moreover, the Q-factor and the inductance grow with the increasing of the air core.
AbstractList A high-Q and fres (self-resonant frequency)solenoid inductor was fabricated by using the microelectromechanical systems(MEMS) technology with air-core structure. This inductor has an air core and an electroplated copper coil to reduce the series resistance, and the solenoid structure with laterally laid out structure saves the chip area significantly. The measurement results show that this inductor has high Q-factor and stable inductance over wide range of operating frequency. The maximum Q-factor of this inductor is 38 and the inductance is 1.78 nH at 5GHz with an air core of 45μm. Moreover, the Q-factor and the inductance grow with the increasing of the air core.
Author Wang, Xi-Ning
Zhou, Yong
Zhao, Xiao-Lin
Fang, Dong-Ming
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SubjectTerms 3-D
Quality factor
RF MEMS
Solenoid inductor
Title Fabrication and performance of a micromachined 3-D solenoid inductor
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