Optimized high-performance ITO/Ag/ITO multilayer transparent electrode deposited by RF magnetron sputtering

• Published in: Superlattices and microstructures Vol. 129; pp. 176 - 184
• Main Authors: Ferhati, H., Djeffal, F., Benhaya, A.
• Format: Journal Article
• Language: English
• Published: Elsevier Ltd 01.05.2019
• Subjects: ITO; Multilayer; PSO; RF-Magnetron sputtering; Sheet resistance; TCO; Transmittance; TCO; RF-Magnetron sputtering; Multilayer; ITO; Sheet resistance; Transmittance; PSO

This paper presents the optimization, elaboration and characterization of a new TCO (Transparent Conductive Oxides) electrode based on ITO/Ag/ITO multilayer design that enables overcoming the trade-off between the electrical and optical properties. A new hybrid approach combining the investigated de...