Optimized high-performance ITO/Ag/ITO multilayer transparent electrode deposited by RF magnetron sputtering
This paper presents the optimization, elaboration and characterization of a new TCO (Transparent Conductive Oxides) electrode based on ITO/Ag/ITO multilayer design that enables overcoming the trade-off between the electrical and optical properties. A new hybrid approach combining the investigated de...
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| Published in | Superlattices and microstructures Vol. 129; pp. 176 - 184 |
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| Main Authors | , , |
| Format | Journal Article |
| Language | English |
| Published |
Elsevier Ltd
01.05.2019
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| Abstract | This paper presents the optimization, elaboration and characterization of a new TCO (Transparent Conductive Oxides) electrode based on ITO/Ag/ITO multilayer design that enables overcoming the trade-off between the electrical and optical properties. A new hybrid approach combining the investigated design and Particle Swarm Optimization (PSO) technique is conducted with the aim of maximizing the Haacke Figures of merit (FoM). It is found that the optimized ITO/Ag/ITO tri-layered design paves a new path toward achieving a high FoM of 125 × 10−3Ω−1. Such improvement is attributed to the improved light management achieved by the efficient modulation of the Ag sub-layer geometry. Subsequently, the optimized multilayer design is fabricated using RF magnetron sputtering technique. The structural, optical and electrical properties associated with the deposited ITO/Ag/ITO multilayer structure are also analyzed. It is found that the fabricated TCO-based electrode shows a high transmittance over than 94.1% and a low sheet resistance of 4.5Ω × sq−1, which is in good agreement with the theoretical predictions. Therefore, the proposed design methodology based on experiments assisted by PSO metaheuristic approach offers exciting opportunities for bridging the gap between transparency and conductivity characteristics. This makes the elaborated ITO/Ag/ITO multilayer design suitable for high-performance optoelectronic applications.
•Highly transparent and low-resistance multilayer electrode is developed.•The electrical and optical properties of IAI electrode were investigated.•IAI structure exhibits improvement over the conventional electrodes.•The maximum FoM is 125 × 10−3Ω−1 for the optimized IAI electrode. |
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| AbstractList | This paper presents the optimization, elaboration and characterization of a new TCO (Transparent Conductive Oxides) electrode based on ITO/Ag/ITO multilayer design that enables overcoming the trade-off between the electrical and optical properties. A new hybrid approach combining the investigated design and Particle Swarm Optimization (PSO) technique is conducted with the aim of maximizing the Haacke Figures of merit (FoM). It is found that the optimized ITO/Ag/ITO tri-layered design paves a new path toward achieving a high FoM of 125 × 10−3Ω−1. Such improvement is attributed to the improved light management achieved by the efficient modulation of the Ag sub-layer geometry. Subsequently, the optimized multilayer design is fabricated using RF magnetron sputtering technique. The structural, optical and electrical properties associated with the deposited ITO/Ag/ITO multilayer structure are also analyzed. It is found that the fabricated TCO-based electrode shows a high transmittance over than 94.1% and a low sheet resistance of 4.5Ω × sq−1, which is in good agreement with the theoretical predictions. Therefore, the proposed design methodology based on experiments assisted by PSO metaheuristic approach offers exciting opportunities for bridging the gap between transparency and conductivity characteristics. This makes the elaborated ITO/Ag/ITO multilayer design suitable for high-performance optoelectronic applications.
•Highly transparent and low-resistance multilayer electrode is developed.•The electrical and optical properties of IAI electrode were investigated.•IAI structure exhibits improvement over the conventional electrodes.•The maximum FoM is 125 × 10−3Ω−1 for the optimized IAI electrode. |
| Author | Djeffal, F. Benhaya, A. Ferhati, H. |
| Author_xml | – sequence: 1 givenname: H. surname: Ferhati fullname: Ferhati, H. organization: LEA, Department of Electronics, University Mostefa Benboulaid-Batna 2, Batna 05000, Algeria – sequence: 2 givenname: F. surname: Djeffal fullname: Djeffal, F. email: faycal.djeffal@univ-batna.dz, faycaldzdz@hotmail.com organization: LEA, Department of Electronics, University Mostefa Benboulaid-Batna 2, Batna 05000, Algeria – sequence: 3 givenname: A. surname: Benhaya fullname: Benhaya, A. organization: LEA, Department of Electronics, University Mostefa Benboulaid-Batna 2, Batna 05000, Algeria |
| BookMark | eNp9kNFqwjAUhsNwMHV7gV3lBVpPmtpY2I3I3ARBGO46xOZU49q0JHHgnn4Rd7ULr_4Dh--H_xuRge0sEvLMIGXAiskx9X1r0gxYmQJPIRN3ZMigLBJeCDEgQxB5mRTAiwcy8v4IAGXOxJB8bfpgWvODmh7M_pD06OrOtcpWSFfbzWS-n8Sg7akJplFndDQ4ZX2vHNpAscEquE4j1dh33oRYszvTjyVt1d5ifFnq-1MI6IzdP5L7WjUen_5yTD6Xr9vFe7LevK0W83VScYCQTAvMhJpirYXiepZDzbId4G6mZ1VdZDnmPBccNa8Ey_VuWiosgSnF44kl43xMsmtv5TrvHdayd6ZV7iwZyIsueZQXXfKiSwKXUVeEZv-gygQVTGfjYNPcRl-uKMZR3wad9JXBaFAbF_1I3Zlb-C8iBYsX |
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| ContentType | Journal Article |
| Copyright | 2019 Elsevier Ltd |
| Copyright_xml | – notice: 2019 Elsevier Ltd |
| DBID | AAYXX CITATION |
| DOI | 10.1016/j.spmi.2019.03.027 |
| DatabaseName | CrossRef |
| DatabaseTitle | CrossRef |
| DatabaseTitleList | |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Chemistry Physics |
| EISSN | 1096-3677 |
| EndPage | 184 |
| ExternalDocumentID | 10_1016_j_spmi_2019_03_027 S0749603619304835 |
| GroupedDBID | --K --M -~X .~1 0R~ 123 1B1 1RT 1~. 1~5 29Q 4.4 457 4G. 5VS 7-5 71M 8P~ 9JN AABXZ AACTN AAEDT AAEDW AAEPC AAIAV AAIKJ AAKOC AALRI AAOAW AAQFI AAQXK AAXUO ABFNM ABJNI ABMAC ABNEU ABXDB ABXRA ABYKQ ACDAQ ACFVG ACGFS ACNNM ACRLP ADBBV ADEZE ADFGL ADMUD AEBSH AEKER AENEX AEZYN AFKWA AFRZQ AFTJW AGHFR AGUBO AGYEJ AHHHB AIEXJ AIKHN AITUG AIVDX AJBFU AJOXV ALMA_UNASSIGNED_HOLDINGS AMFUW AMRAJ ASPBG AVWKF AXJTR AZFZN BBWZM BKOJK BLXMC CAG COF CS3 DM4 DU5 EBS EFBJH EFLBG EJD EO8 EO9 EP2 EP3 FDB FEDTE FGOYB FIRID FNPLU FYGXN G-2 G-Q GBLVA HMV HVGLF HZ~ IHE J1W KOM LG5 M24 M37 MAGPM MO0 N9A NDZJH O-L O9- OAUVE OGIMB OZT P-8 P-9 P2P PC. Q38 R2- RIG RNS ROL RPZ SDF SDG SDP SES SEW SMS SPC SPCBC SPD SPG SSM SSQ SSZ T5K UHS WUQ XPP ZMT ZU3 ~G- AATTM AAXKI AAYWO AAYXX ABWVN ACRPL ACVFH ADCNI ADNMO AEIPS AEUPX AFPUW AFXIZ AGQPQ AGRNS AIGII AIIUN AKBMS AKRWK AKYEP ANKPU BNPGV CITATION SSH |
| ID | FETCH-LOGICAL-c300t-56e27a5efd7a3d840f12b0eb8d8cf624e43473ed3c714db59ae901aa3b59e9133 |
| IEDL.DBID | .~1 |
| ISSN | 0749-6036 |
| IngestDate | Thu Apr 24 23:07:56 EDT 2025 Tue Jul 01 01:35:12 EDT 2025 Fri Feb 23 02:28:12 EST 2024 |
| IsPeerReviewed | false |
| IsScholarly | false |
| Keywords | TCO RF-Magnetron sputtering Multilayer ITO Sheet resistance Transmittance PSO |
| Language | English |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-LOGICAL-c300t-56e27a5efd7a3d840f12b0eb8d8cf624e43473ed3c714db59ae901aa3b59e9133 |
| PageCount | 9 |
| ParticipantIDs | crossref_primary_10_1016_j_spmi_2019_03_027 crossref_citationtrail_10_1016_j_spmi_2019_03_027 elsevier_sciencedirect_doi_10_1016_j_spmi_2019_03_027 |
| ProviderPackageCode | CITATION AAYXX |
| PublicationCentury | 2000 |
| PublicationDate | May 2019 2019-05-00 |
| PublicationDateYYYYMMDD | 2019-05-01 |
| PublicationDate_xml | – month: 05 year: 2019 text: May 2019 |
| PublicationDecade | 2010 |
| PublicationTitle | Superlattices and microstructures |
| PublicationYear | 2019 |
| Publisher | Elsevier Ltd |
| Publisher_xml | – name: Elsevier Ltd |
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| SSID | ssj0009417 |
| Score | 2.0559924 |
| Snippet | This paper presents the optimization, elaboration and characterization of a new TCO (Transparent Conductive Oxides) electrode based on ITO/Ag/ITO multilayer... |
| SourceID | crossref elsevier |
| SourceType | Enrichment Source Index Database Publisher |
| StartPage | 176 |
| SubjectTerms | ITO Multilayer PSO RF-Magnetron sputtering Sheet resistance TCO Transmittance |
| Title | Optimized high-performance ITO/Ag/ITO multilayer transparent electrode deposited by RF magnetron sputtering |
| URI | https://dx.doi.org/10.1016/j.spmi.2019.03.027 |
| Volume | 129 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV1LS8NAEF5KRfQiWhXro-zBm8RsspvXsRRLq9iCttBbSLKbUm1rsPGgB3-7M5vEKkgPnvJgNwmTzTzCN99HyKWNnHM-tww7cAMDIpQyAk-LCDAFztGFnBy7ke8Hbm8sbifOpEY6VS8MwipL31_4dO2tyzNmaU0zm83MRwh-kH5zqAA43g4bzYXwcJVff65hHoHQqrs42MDRZeNMgfFaZYsZwrsKolNUlvkrOP0ION19sldmirRdPMwBqallg-x0KoG2BtnW6M1kdUieh_DhL2YfSlKkHzaydTcA7Y-GZntqwoZq8OA8giSb5prTHBvBcloq4UhFpdIYLrhM_E4funQRTZcK_5XTVaYFrSHOHZFx92bU6RmlioKRcMZyw3GV7UWOSqUXcQn1XGrZMVOxL_0kdW2hBBceV5InniVk7CBbN7OiiMOuCqCEPSb15ctSnRCquMtSN0aSwED4ksVxIqw0cXiSMj_1oiaxKvOFSUkxjkoX87DCkj2FaPIQTR4yHoLJm-Tqe05WEGxsHO1UbyX8tUxCiAAb5p3-c94Z2cWjAuF4Tur565u6gCwkj1t6mbXIVrt_1xt8AW1o3DQ |
| linkProvider | Elsevier |
| linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwtV1Lb9QwEB5VRahcqlJa0QfgA5xQGid2XgcOVWG1S18S3Uq9uUk8qbbtbiM2CJUDf4o_yIyTUJCqHpB6SpTEiTO2ZsbWN98H8DZkzrlUBV6YxZlHEQq9LHEiAhLJOcaUk3M18uFRPDzVn8-iswX41dfCMKyy8_2tT3feurvid9b068nEP6HgR-m3ohWA4s_1yMp9vP1O67b5h9FHGuR3YTj4NN4bep20gFcqKRsvijFM8ggrm-TK0iKnCsJCYpHatKziUKNWOlFoVZkE2hYRU1jLIM8VnWIW8C4o-f0nmtwFyybs_LzDlWTayfxy7zzuXlep04LK5vV0wniyllmVpWzui4Z_RbjBCix3qanYbf_-OSzgbBWW9npFuFV46uCi5fwFXB2Tp5lOfqAVzHfs1XflB2I0PvZ3L3w6CIdWvM4pqxeNI1HnyrNGdNI7FoVFBxqj1xS34stATPOLGfLmvJjXTkGbAusanD6KbddhcXYzw5cgUMWyigtmJcx0amVRlDqoykiVlUyrJN-AoDefKTtOc5bWuDY9eO3SsMkNm9xIZcjkG_D-T5u6ZfR48OmoHxXzz7w0FHIeaLf5n-3ewNJwfHhgDkZH-1vwjO-08MptWGy-fsNXlAI1xWs35QScP_Yc_w1YqhhV |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Optimized+high-performance+ITO%2FAg%2FITO+multilayer+transparent+electrode+deposited+by+RF+magnetron+sputtering&rft.jtitle=Superlattices+and+microstructures&rft.au=Ferhati%2C+H.&rft.au=Djeffal%2C+F.&rft.au=Benhaya%2C+A.&rft.date=2019-05-01&rft.issn=0749-6036&rft.volume=129&rft.spage=176&rft.epage=184&rft_id=info:doi/10.1016%2Fj.spmi.2019.03.027&rft.externalDBID=n%2Fa&rft.externalDocID=10_1016_j_spmi_2019_03_027 |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0749-6036&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0749-6036&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0749-6036&client=summon |