3D micromachining of SU-8 polymer with proton microbeam

• Published in: Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Vol. 241; no. 1-4; pp. 479 - 485
• Main Authors: Simčič, J., Pelicon, P., Rupnik, Z., Mihelič, M., Razpet, A., Jenko, D., Maček, M.
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.12.2005
• Subjects: Dose normalization; Micromachining; Proton beam writing; SU-8; 41.75.Ak; 81.16.Nd; Micromachining; Dose normalization; 34.50.Bw; 61.82.Pv; SU-8; Proton beam writing

Proton beam writing system has been developed at the nuclear microprobe of the Ljubljana tandetron laboratory. The system incorporates existing scanning system with the external beam positioning and fast beam switching system. Microstructures are produced according to the digital plan in the B&W...