Optimization on flow field in an operational cleanroom subject to kinematic component and structural parameters

• Published in: Journal of Building Engineering Vol. 59; p. 105152
• Main Authors: Liu, Kun, Hao, Ming, Li, Bangyu, Guan, Tianen, Chen, Shulei, Wang, Guipeng, Xie, Yuanhua, Bian, Xin
• Format: Journal Article
• Language: English
• Published: Elsevier Ltd 01.11.2022
• Subjects: Dynamic numerical simulation; Momentum source; Orthogonal design optimization; Overset mesh; Unidirectional cleanroom; Overset mesh; Orthogonal design optimization; Unidirectional cleanroom; Momentum source; Dynamic numerical simulation

Due to the high uniformity and stability of streamline, unidirectional cleanrooms are widely used in semiconductor clean workshops. However, the moving parts and complex process of production in the cleanrooms may cause disturbance of the streamline, leading to increased contamination. In this study...