Accuracy limitations for composition analysis by XPS using relative peak intensities: LiF as an example

• Published in: Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vol. 39; no. 1
• Main Authors: Brundle, Christopher Richard, Crist, Bruce Vincent, Bagus, Paul S.
• Format: Journal Article
• Language: English
• Published: 01.01.2021

Although precision in XPS can be excellent, allowing small changes to be easily observed, obtaining an accurate absolute elemental composition of a solid material from relative peak intensities is generally much more problematical, involving many factors such as background removal, differing analysi...