APA (7th ed.) Citation

Wilke, M., Harnisch, K., Knapp, W., Ecke, M., & Halle, T. (2019). Focusing of x-rays emitted by a pyroelectric x-ray generator for micro x-ray fluorescence. Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 37(1), . https://doi.org/10.1116/1.5067322

Chicago Style (17th ed.) Citation

Wilke, Markus, Karsten Harnisch, Wolfram Knapp, Martin Ecke, and Thorsten Halle. "Focusing of X-rays Emitted by a Pyroelectric X-ray Generator for Micro X-ray Fluorescence." Journal of Vacuum Science and Technology. B, Nanotechnology & Microelectronics 37, no. 1 (2019). https://doi.org/10.1116/1.5067322.

MLA (9th ed.) Citation

Wilke, Markus, et al. "Focusing of X-rays Emitted by a Pyroelectric X-ray Generator for Micro X-ray Fluorescence." Journal of Vacuum Science and Technology. B, Nanotechnology & Microelectronics, vol. 37, no. 1, 2019, https://doi.org/10.1116/1.5067322.

Warning: These citations may not always be 100% accurate.