Characteristics of CrAlSiN+DLC coating deposited by lateral rotating cathode arc PVD and PACVD process - Lukaszkowicz, Krzysztof; Sondor, Jozef; Balin, Katarzyna; Kubacki, Jerzy (Applied surface science, 2014)
Keywords: Coating; Condensed matter: electronic structure, electrical, magnetic, and optical properties; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Deposition; Diamond-like carbon films; Exact sciences and technology; Friction; Hot work tool steels; Physical vapor deposition; Physics; Scanning electron microscopy; Texture; X-ray photoelectron spectroscopy; Atomic force microscopy; Scanning electron microscopy; Tribological properties; AFM; AES; HRTEM; Transmission electron microscopy; ToF-SIMS; Physical vapor deposition; DLC film; Chemical composition; SIMS; SEM; XPS; Cathodes; X-ray photoelectron spectra; CrAISiN film