Characteristics of CrAlSiN+DLC coating deposited by lateral rotating cathode arc PVD and PACVD process
Coating system composed of CrAlSiN film covered by diamond-like carbon (DLC)-based lubricant, deposited on hot work tool steel substrate was the subject of the research. The CrAlSiN and DLC layers were deposited by PVD lateral rotating ARC-cathodes (LARC) and PACVD technology on the X40CrMoV5-1 resp...
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Published in | Applied surface science Vol. 312; pp. 126 - 133 |
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Language | English |
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Elsevier
01.09.2014
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Abstract | Coating system composed of CrAlSiN film covered by diamond-like carbon (DLC)-based lubricant, deposited on hot work tool steel substrate was the subject of the research. The CrAlSiN and DLC layers were deposited by PVD lateral rotating ARC-cathodes (LARC) and PACVD technology on the X40CrMoV5-1 respectively. HRTEM investigation shows an amorphous character of DLC layer. It was found that the tested CrAlSiN layer has a nanostructural character with fine crystallites while their average size is less than 10nm. Based on the XRD pattern of the CrAlSiN, the occurrence of fcc phase was only observed in the coating, the texture direction 311 is perpendicular to the sample surface. Combined SEM, AES and ToF-SIMS studies confirmed assumed chemical composition and layered structure of the coating. The chemical distribution of the elements inside the layers and at the interfaces was analyzed by SEM and AES methods. It was shown that additional CrN layer is present between substrate and CrAlSiN coating. The atomic concentration of the particular elements of DLC and CrAlSiN layer was calculated from the XPS measurements. In sliding dry friction conditions the friction coefficient for the investigated elements is set in the range between 0.05 and 0.07. The investigated coating reveals high wear resistance. The coating demonstrated a dense cross-sectional morphology as well as good adhesion to the substrate. |
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AbstractList | Coating system composed of CrAlSiN film covered by diamond-like carbon (DLC)-based lubricant, deposited on hot work tool steel substrate was the subject of the research. The CrAlSiN and DLC layers were deposited by PVD lateral rotating ARC-cathodes (LARC) and PACVD technology on the X40CrMoV5-1 respectively. HRTEM investigation shows an amorphous character of DLC layer. It was found that the tested CrAlSiN layer has a nanostructural character with fine crystallites while their average size is less than 10nm. Based on the XRD pattern of the CrAlSiN, the occurrence of fcc phase was only observed in the coating, the texture direction 311 is perpendicular to the sample surface. Combined SEM, AES and ToF-SIMS studies confirmed assumed chemical composition and layered structure of the coating. The chemical distribution of the elements inside the layers and at the interfaces was analyzed by SEM and AES methods. It was shown that additional CrN layer is present between substrate and CrAlSiN coating. The atomic concentration of the particular elements of DLC and CrAlSiN layer was calculated from the XPS measurements. In sliding dry friction conditions the friction coefficient for the investigated elements is set in the range between 0.05 and 0.07. The investigated coating reveals high wear resistance. The coating demonstrated a dense cross-sectional morphology as well as good adhesion to the substrate. |
Author | Sondor, Jozef Kubacki, Jerzy Balin, Katarzyna Lukaszkowicz, Krzysztof |
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Cites_doi | 10.1016/j.surfcoat.2010.08.156 10.1016/j.vacuum.2011.10.031 10.1016/j.apsusc.2013.06.033 10.1504/IJSURFSE.2007.016693 10.5545/sv-jme.2012.625 10.1016/j.matchemphys.2011.03.078 10.1016/j.solmat.2011.10.028 10.1016/j.surfcoat.2007.12.041 10.1016/j.ijrmhm.2011.09.010 10.1016/S0257-8972(98)00821-4 10.1016/S0927-796X(02)00005-0 10.1016/j.triboint.2010.04.008 10.1016/j.surfcoat.2008.06.019 10.1016/j.tsf.2010.10.022 10.1016/j.apsusc.2010.11.137 10.1016/j.surfcoat.2006.07.118 10.1016/j.actamat.2008.04.066 10.1007/s10853-009-4140-1 10.1016/j.surfcoat.2008.09.027 10.1016/j.jmatprotec.2008.01.035 10.1016/j.apsusc.2008.07.066 10.1007/s10853-008-2523-3 10.1179/1743294412Y.0000000033 10.1016/j.tsf.2004.10.053 |
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Keywords | Atomic force microscopy Scanning electron microscopy Tribological properties AFM AES HRTEM Transmission electron microscopy ToF-SIMS Physical vapor deposition DLC film Chemical composition SIMS SEM XPS Cathodes X-ray photoelectron spectra CrAISiN film |
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References | Trava-Airoldi (10.1016/j.apsusc.2014.03.024_bib0090) 2007; 1 Dobrzanski (10.1016/j.apsusc.2014.03.024_bib0040) 2013; 59 Chen (10.1016/j.apsusc.2014.03.024_bib0075) 2010; 205 Vilaseca (10.1016/j.apsusc.2014.03.024_bib0015) 2011; 272 Veprek (10.1016/j.apsusc.2014.03.024_bib0085) 2005; 476 Ding (10.1016/j.apsusc.2014.03.024_bib0060) 2011; 519 Czyzniewski (10.1016/j.apsusc.2014.03.024_bib0095) 2009; 203 Calliari (10.1016/j.apsusc.2014.03.024_bib0055) 2008; 255 Lukaszkowicz (10.1016/j.apsusc.2014.03.024_bib0020) 2008; 43 Neves (10.1016/j.apsusc.2014.03.024_bib0005) 2013; 282 Ho (10.1016/j.apsusc.2014.03.024_bib0065) 2011; 257 Lukaszkowicz (10.1016/j.apsusc.2014.03.024_bib0045) 2010; 45 Kim (10.1016/j.apsusc.2014.03.024_bib0125) 2008; 202 Selvakumar (10.1016/j.apsusc.2014.03.024_bib0025) 2012; 98 Soldan (10.1016/j.apsusc.2014.03.024_bib0080) 2008; 202 Wanstrand (10.1016/j.apsusc.2014.03.024_bib0105) 1999; 111 Zhang (10.1016/j.apsusc.2014.03.024_bib0035) 2008; 56 Bobzin (10.1016/j.apsusc.2014.03.024_bib0050) 2009; 209 Wong (10.1016/j.apsusc.2014.03.024_bib0110) 2010; 43/10 Tanski (10.1016/j.apsusc.2014.03.024_bib0010) 2012; 28 Lukaszkowicz (10.1016/j.apsusc.2014.03.024_bib0100) 2012; 86 Robertson (10.1016/j.apsusc.2014.03.024_bib0115) 2002; 37 Park (10.1016/j.apsusc.2014.03.024_bib0120) 2007; 201 Polcar (10.1016/j.apsusc.2014.03.024_bib0070) 2011; 129 Aihua (10.1016/j.apsusc.2014.03.024_bib0030) 2012; 31 |
References_xml | – volume: 205 start-page: 1189 year: 2010 ident: 10.1016/j.apsusc.2014.03.024_bib0075 article-title: Oxidation behavior of Si-doped nanocomposite CrAlSiN coatings publication-title: Surf. Coat. Technol. doi: 10.1016/j.surfcoat.2010.08.156 – volume: 86 start-page: 1186 year: 2012 ident: 10.1016/j.apsusc.2014.03.024_bib0100 article-title: Structure and mechanical properties of PVD coatings deposited onto the X40CrMoV5-1 hot work tool steel substrate publication-title: Vacuum doi: 10.1016/j.vacuum.2011.10.031 – volume: 282 start-page: 680 year: 2013 ident: 10.1016/j.apsusc.2014.03.024_bib0005 article-title: Microstructural analyses and wear behavior of the cemented carbide tools after laser surface treatment and PVD coating publication-title: Appl. Surf. Sci. doi: 10.1016/j.apsusc.2013.06.033 – volume: 1 start-page: 417 year: 2007 ident: 10.1016/j.apsusc.2014.03.024_bib0090 article-title: Tribological and mechanical properties of DLC film obtained on metal surface by an enhanced and low-cost pulsed-DC discharge publication-title: Int. J. Surf. Sci. Eng. doi: 10.1504/IJSURFSE.2007.016693 – volume: 59 start-page: 175 year: 2013 ident: 10.1016/j.apsusc.2014.03.024_bib0040 article-title: Final manufacturing process of front side metallisation on silicon solar cells using conventional and unconventional techniques publication-title: J. Mech. Eng. doi: 10.5545/sv-jme.2012.625 – volume: 129 start-page: 195 year: 2011 ident: 10.1016/j.apsusc.2014.03.024_bib0070 article-title: High temperature properties of CrAlN, CrAlSiN and AlCrSiN coatings – structure and oxidation publication-title: Mater. Chem. Phys. doi: 10.1016/j.matchemphys.2011.03.078 – volume: 98 start-page: 1 year: 2012 ident: 10.1016/j.apsusc.2014.03.024_bib0025 article-title: Review of physical vapor deposited (PVD) spectrally selective coatings for mid- and high-temperature solar thermal application publication-title: Sol. Energy Mater. Sol. Cells doi: 10.1016/j.solmat.2011.10.028 – volume: 202 start-page: 3555 year: 2008 ident: 10.1016/j.apsusc.2014.03.024_bib0080 article-title: Structure–property relations of arc-evaporated Al-Cr-Si-N coatings publication-title: Surf. Coat. Technol. doi: 10.1016/j.surfcoat.2007.12.041 – volume: 31 start-page: 82 year: 2012 ident: 10.1016/j.apsusc.2014.03.024_bib0030 article-title: Friction and wear properties of TiN, TiAlN, AlTiN and CrAlN nitride coatings publication-title: Int. J. Refract. Met. Hard Mater. doi: 10.1016/j.ijrmhm.2011.09.010 – volume: 111 start-page: 247 year: 1999 ident: 10.1016/j.apsusc.2014.03.024_bib0105 article-title: Mechanical and tribological evaluation of PVD WC/C coatings publication-title: Surf. Coat. Technol. doi: 10.1016/S0257-8972(98)00821-4 – volume: 272 start-page: 105 year: 2011 ident: 10.1016/j.apsusc.2014.03.024_bib0015 article-title: High temperature behaviour of tool steels during sliding against aluminium publication-title: Wear – volume: 37 start-page: 129 year: 2002 ident: 10.1016/j.apsusc.2014.03.024_bib0115 article-title: Diamond-like amorphous carbon publication-title: Mater. Sci. Eng. R doi: 10.1016/S0927-796X(02)00005-0 – volume: 43/10 start-page: 1806 year: 2010 ident: 10.1016/j.apsusc.2014.03.024_bib0110 article-title: Interpretation of the hardness of worn DLC particles using micro-Raman spectroscopy publication-title: Tribol. Int. doi: 10.1016/j.triboint.2010.04.008 – volume: 202 start-page: 5400 year: 2008 ident: 10.1016/j.apsusc.2014.03.024_bib0125 article-title: Effect of cathode arc current and bias voltage on the mechanical properties of CrAlSiN thin films publication-title: Surf. Coat. Technol. doi: 10.1016/j.surfcoat.2008.06.019 – volume: 519 start-page: 1894 year: 2011 ident: 10.1016/j.apsusc.2014.03.024_bib0060 article-title: Structure and properties of CrAlSiN nanocomposite coatings deposited by lateral rotating cathode arc publication-title: Thin Solid Films doi: 10.1016/j.tsf.2010.10.022 – volume: 257 start-page: 3770 year: 2011 ident: 10.1016/j.apsusc.2014.03.024_bib0065 article-title: Characteristics of PVD-CrAlSiN films after post-coat heat treatments in nitrogen publication-title: Appl. Surf. Sci. doi: 10.1016/j.apsusc.2010.11.137 – volume: 201 start-page: 5223 year: 2007 ident: 10.1016/j.apsusc.2014.03.024_bib0120 article-title: Microstructure, mechanical properties, and tribological behaviors of Cr–Al–N, Cr–Si–N, and Cr–Al–Si–N coatings by a hybrid coating system publication-title: Surf. Coat. Technol. doi: 10.1016/j.surfcoat.2006.07.118 – volume: 56 start-page: 4440 year: 2008 ident: 10.1016/j.apsusc.2014.03.024_bib0035 article-title: Stability of Ti–B–N solid solutions and the formation of nc-TiN/a-BN nanocomposites studied by combined ab initio and thermodynamic calculations publication-title: Acta Mater. doi: 10.1016/j.actamat.2008.04.066 – volume: 45 start-page: 1629 year: 2010 ident: 10.1016/j.apsusc.2014.03.024_bib0045 article-title: Structure, mechanical properties and corrosion resistance of nanocomposite coatings deposited by PVD technology onto the X6CrNiMoTi17-12-2 and X40CrMoV5-1 steel substrates publication-title: J. Mater. Sci. doi: 10.1007/s10853-009-4140-1 – volume: 203 start-page: 1027 year: 2009 ident: 10.1016/j.apsusc.2014.03.024_bib0095 article-title: Preparation and characteristics of a-C and a-C:H coatings deposited by pulsed magnetron publication-title: Surf. Coat. Technol. doi: 10.1016/j.surfcoat.2008.09.027 – volume: 209 start-page: 165 year: 2009 ident: 10.1016/j.apsusc.2014.03.024_bib0050 article-title: Advantages of nanocomposite coatings deposited by high power pulse magnetron sputtering technology publication-title: J. Mater. Process. Technol. doi: 10.1016/j.jmatprotec.2008.01.035 – volume: 255 start-page: 2214 year: 2008 ident: 10.1016/j.apsusc.2014.03.024_bib0055 article-title: Composition and structure of a-C:Au nanocomposites obtained by physical vapour deposition publication-title: Appl. Surf. Sci. doi: 10.1016/j.apsusc.2008.07.066 – volume: 43 start-page: 3400 year: 2008 ident: 10.1016/j.apsusc.2014.03.024_bib0020 article-title: Structure and mechanical properties of gradient coatings deposited by PVD technology onto X40CrMoV5-1 steel substrate publication-title: J. Mater. Sci. doi: 10.1007/s10853-008-2523-3 – volume: 28 start-page: 598 year: 2012 ident: 10.1016/j.apsusc.2014.03.024_bib0010 article-title: Structure and properties of PVD coatings deposited on aluminium alloys publication-title: Surf. Eng. doi: 10.1179/1743294412Y.0000000033 – volume: 476 start-page: 1 year: 2005 ident: 10.1016/j.apsusc.2014.03.024_bib0085 article-title: Different approaches to superhard coatings and nanocomposites publication-title: Thin Solid Films doi: 10.1016/j.tsf.2004.10.053 |
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SubjectTerms | Coating Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science; rheology Deposition Diamond-like carbon films Exact sciences and technology Friction Hot work tool steels Physical vapor deposition Physics Scanning electron microscopy Texture X-ray photoelectron spectroscopy |
Title | Characteristics of CrAlSiN+DLC coating deposited by lateral rotating cathode arc PVD and PACVD process |
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