Preparation and characterization of La0.9Sr0.1Ga0.8Mg0.2O3–δ thin film deposited by radio frequency magnetic sputtering - 阳建君 马文会 于洁 陈秀华 邢洁 李蕊 (Journal of rare earths, 2013)
Keywords: annealing; Deposition; Electrolytes; Grain size; Island growth; LSGM; magnetic sputtering; Rare earth metals; rare earths; Silicon substrates; solid state reaction; Sputtering; Thin films; 制备; 射频磁控溅射; 沉积薄膜; 生长方向; 电解质材料; 薄膜沉积; 表征; magnetic sputtering; solid state reaction; annealing; island growth; rare earths