Atomic layer deposition of vanadium oxides using vanadyl acetylacetonate as the precursor
•A growth temperature of 420°C for decomposition of VO(acac)2 is optimally required.•Thermochromic properties are present by atomic layer deposition with VO(acac)2.•Annealing temperature much influences inter-diffusion of atoms on thermochromics. Thermochromic VO2 thin films are fabricated by atomic...
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Published in | Thin solid films Vol. 725; p. 138639 |
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Main Authors | , , , , , , |
Format | Journal Article |
Language | English |
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01.05.2021
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Abstract | •A growth temperature of 420°C for decomposition of VO(acac)2 is optimally required.•Thermochromic properties are present by atomic layer deposition with VO(acac)2.•Annealing temperature much influences inter-diffusion of atoms on thermochromics.
Thermochromic VO2 thin films are fabricated by atomic layer deposition with vanadyl acetylacetonate as the precursor. The crystallization process has been performed by post-annealing process, i.e. rapid thermal annealing. The effect of annealing temperature on thermochromic properties is investigated. Though the transmittance increases with increasing annealing temperature, a moderate temperature is suggested by the consideration of atomic inter-diffusion between TiO2 and VO2 layers. It is found that an oxygen-deficient phase of V2O3 appears at low annealing temperatures, while an oxygen-ambient phase of V2O5 presents at high temperatures. Additionally, a ternary compound, Ti3V6O17 is dominant beyond 700°C. The crystalline behavior of monoclinic phase of VO2 and Ti3V6O17 observed from the X-ray diffraction pattern is further examined by high resolution transmission electron microscope. The depth profiling in binding energies of V 2p, O 1s and Ti 2p orbits are compared. |
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AbstractList | •A growth temperature of 420°C for decomposition of VO(acac)2 is optimally required.•Thermochromic properties are present by atomic layer deposition with VO(acac)2.•Annealing temperature much influences inter-diffusion of atoms on thermochromics.
Thermochromic VO2 thin films are fabricated by atomic layer deposition with vanadyl acetylacetonate as the precursor. The crystallization process has been performed by post-annealing process, i.e. rapid thermal annealing. The effect of annealing temperature on thermochromic properties is investigated. Though the transmittance increases with increasing annealing temperature, a moderate temperature is suggested by the consideration of atomic inter-diffusion between TiO2 and VO2 layers. It is found that an oxygen-deficient phase of V2O3 appears at low annealing temperatures, while an oxygen-ambient phase of V2O5 presents at high temperatures. Additionally, a ternary compound, Ti3V6O17 is dominant beyond 700°C. The crystalline behavior of monoclinic phase of VO2 and Ti3V6O17 observed from the X-ray diffraction pattern is further examined by high resolution transmission electron microscope. The depth profiling in binding energies of V 2p, O 1s and Ti 2p orbits are compared. |
ArticleNumber | 138639 |
Author | Yang, Cheng-Ye Lin, Kuei-Chih Chen, Chien-Lin Cho, Wen-Hao Li, Guo-Ren Juan, Pi-Chun Kei, Chi-Chung |
Author_xml | – sequence: 1 givenname: Pi-Chun surname: Juan fullname: Juan, Pi-Chun email: pcjuan@mail.mcut.edu.tw organization: Department of Materials Engineering and Center for Plasma and Thin Film Technologies, Ming Chi University of Technology, New Taipei 243, Taiwan – sequence: 2 givenname: Kuei-Chih surname: Lin fullname: Lin, Kuei-Chih organization: Dept. of Electronic Engineering, Ming Chuan University, Taoyuan 333, Taiwan – sequence: 3 givenname: Wen-Hao surname: Cho fullname: Cho, Wen-Hao organization: National Applied Research Laboratories, Taiwan Instrument Research Institute, Hsinchu 300, Taiwan – sequence: 4 givenname: Chien-Lin surname: Chen fullname: Chen, Chien-Lin organization: National Applied Research Laboratories, Taiwan Instrument Research Institute, Hsinchu 300, Taiwan – sequence: 5 givenname: Cheng-Ye surname: Yang fullname: Yang, Cheng-Ye organization: National Applied Research Laboratories, Taiwan Instrument Research Institute, Hsinchu 300, Taiwan – sequence: 6 givenname: Chi-Chung surname: Kei fullname: Kei, Chi-Chung organization: National Applied Research Laboratories, Taiwan Instrument Research Institute, Hsinchu 300, Taiwan – sequence: 7 givenname: Guo-Ren surname: Li fullname: Li, Guo-Ren organization: Department of Materials Engineering and Center for Plasma and Thin Film Technologies, Ming Chi University of Technology, New Taipei 243, Taiwan |
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Cites_doi | 10.1002/adfm.201402687 10.1016/j.apsusc.2014.05.216 10.1039/C2RA22820C 10.1016/j.apenergy.2017.11.039 10.1039/C7RA10865F 10.1016/j.surfcoat.2007.05.016 10.1116/1.4931723 10.1007/s10971-015-3913-z 10.1002/cvde.200506419 10.1016/j.tsf.2019.137443 10.1002/admi.201600164 10.1002/aelm.201500093 10.1149/1.1838572 10.1021/nl1032205 10.1016/S0254-0584(97)01940-8 10.1039/c3cs35508j 10.1063/1.4819965 10.1039/b708856f 10.1016/j.jcrysgro.2004.11.144 10.1039/C8TC00626A 10.1364/OME.9.000663 10.1039/C3TA14124A 10.1016/j.ijrmhm.2015.08.012 10.1134/S0020168515090150 10.1021/cm202901z 10.1016/j.solmat.2010.08.035 10.1016/j.tsf.2011.10.053 10.1039/b316531k 10.1063/1.1446215 10.1039/C6RA25071H 10.1016/j.apsusc.2016.10.044 10.1149/1.3205040 10.1038/nature12425 10.1016/j.nanoen.2014.09.023 10.1063/1.4906122 10.1039/c3ra40370j |
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Keywords | Atomic layer deposition Thermochromic films Vanadium dioxide, X-ray photoelectron spectroscopy |
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References | Juan, Lin, Lin, Tsai, Chen (bib0004) 2019; 687 Wu, Feng, Xie (bib0032) 2013; 42 Jo, Myeong, Kim (bib0010) 2018; 8 Zheng, Bao, Jin (bib0024) 2015; 11 Li, Niklasson, Granqvist (bib0030) 2012; 520 Zheng, Hou, Wang, Meng, Zheng, Zheng (bib0038) 2016; 54 Chen, Pomerantseva, Banerjee, Gregorczyk, Ghodssi, Rubloff (bib0019) 2012; 24 Peter, Martens, Rampelberg, Toeller, Ablett, Meersschaut, Cuypers, Franquet, Detavernier, Rueff, Schaekers, Elshocht, Jurczak, Adelmann, Radu (bib0022) 2015; 25 Wang, Duchamp, Xue, Dunin-Borkowski, Liu, Long (bib0012) 2016; 3 Wang, Owusu, Mai, Ke, Zhou, Hu, Magdassi, Long (bib0015) 2018; 211 Dai, Lian, Miller, Wang, Shi, Liu, Song, Wang (bib0025) 2019; 9 Lv, Cao, Yan, Li, Song (bib0027) 2017; 396 Dagur, Mane, Shivashankar (bib0023) 2005; 275 Botto, Vassallo, Baran, Minelli (bib0028) 1997; 50 Hu, Shi, Huang, Zhu, Yue, Xiao, Liang, Lu (bib0034) 2016; 78 Miller, Wang (bib0003) 2015; 117 Moulder, Stickle, Sobol, Bomben (bib0026) 1992 Qureshi, Manning, Parkin (bib0008) 2004; 14 Juan, Mong, Huang (bib0037) 2013; 114 Vila-Fungueiriño, Rivas-Murias, Rubio-Zuazo, Carretero-Genevrier, Lazzari, Rivadulla (bib0011) 2018; 6 Warwickab, Binions (bib0006) 2014 Du, Gao, Luo, Kang, Zhang, Chen, Cao (bib0035) 2011; 95 Musschoot, Deduytsche, Van Meirhaeghe, Detavernier (bib0020) 2009; 25 Muraoka, Hiroi (bib0033) 2002; 80 Vernardou, Pemble, Sheel (bib0007) 2006; 12 Blanquart, Niinisto, Gavagnin, Longo, Heikkila, Puukilainen, Pallem, Dussarrat, Ritala, Leskelä (bib0021) 2013; 3 Nakano, Okuyama, Shibuya, Mizumaki, Ohsumi, Yoshida, Takata, Kawasaki, Tokura, Arima, Iwasa (bib0001) 2015; 1 Wang, Huang, Magdassi, Mandler, Liu, Long (bib0009) 2013; 3 Binions, Hyett, Piccirillo, Parkin (bib0013) 2007; 17 Zhang, Liu, Turner, Tracy, Benson (bib0018) 1998; 145 Guo, Chen, Shi, Ishaq, Wan, Chen, Zhang, Luo, Gao (bib0029) 2017; 7 Liu, Cao, Fan, Hao, Martin, Shen, Wu, Wang (bib0002) 2011; 11 Kim, Kim, Kim, An (bib0014) 2014; 313 Park, Coy, Kasirga, Huang, Fei, Hunter, Cobden (bib0036) 2013; 500 Sun, Cao, Gao, Long, Liang, Jin (bib0031) 2016; 109 Wang, Cao, Yang, Yan, Li (bib0005) 2016; 34 Kritikos, Zambelis, Papadimitropoulos, Davazoglou (bib0016) 2007; 201 Nenashev, Mordvinova, Zlomanov, Kuznetsov (bib0017) 2015; 51 Vila-Fungueiriño (10.1016/j.tsf.2021.138639_bib0011) 2018; 6 Kritikos (10.1016/j.tsf.2021.138639_bib0016) 2007; 201 Wang (10.1016/j.tsf.2021.138639_bib0015) 2018; 211 Nenashev (10.1016/j.tsf.2021.138639_bib0017) 2015; 51 Vernardou (10.1016/j.tsf.2021.138639_bib0007) 2006; 12 Liu (10.1016/j.tsf.2021.138639_bib0002) 2011; 11 Wu (10.1016/j.tsf.2021.138639_bib0032) 2013; 42 Li (10.1016/j.tsf.2021.138639_bib0030) 2012; 520 Wang (10.1016/j.tsf.2021.138639_bib0012) 2016; 3 Wang (10.1016/j.tsf.2021.138639_bib0009) 2013; 3 Miller (10.1016/j.tsf.2021.138639_bib0003) 2015; 117 Musschoot (10.1016/j.tsf.2021.138639_bib0020) 2009; 25 Sun (10.1016/j.tsf.2021.138639_bib0031) 2016; 109 Hu (10.1016/j.tsf.2021.138639_bib0034) 2016; 78 Juan (10.1016/j.tsf.2021.138639_bib0004) 2019; 687 Chen (10.1016/j.tsf.2021.138639_bib0019) 2012; 24 Nakano (10.1016/j.tsf.2021.138639_bib0001) 2015; 1 Jo (10.1016/j.tsf.2021.138639_bib0010) 2018; 8 Dai (10.1016/j.tsf.2021.138639_bib0025) 2019; 9 Lv (10.1016/j.tsf.2021.138639_bib0027) 2017; 396 Moulder (10.1016/j.tsf.2021.138639_bib0026) 1992 Qureshi (10.1016/j.tsf.2021.138639_bib0008) 2004; 14 Zheng (10.1016/j.tsf.2021.138639_bib0024) 2015; 11 Binions (10.1016/j.tsf.2021.138639_bib0013) 2007; 17 Warwickab (10.1016/j.tsf.2021.138639_bib0006) 2014 Dagur (10.1016/j.tsf.2021.138639_bib0023) 2005; 275 Zheng (10.1016/j.tsf.2021.138639_bib0038) 2016; 54 Kim (10.1016/j.tsf.2021.138639_bib0014) 2014; 313 Zhang (10.1016/j.tsf.2021.138639_bib0018) 1998; 145 Botto (10.1016/j.tsf.2021.138639_bib0028) 1997; 50 Juan (10.1016/j.tsf.2021.138639_bib0037) 2013; 114 Wang (10.1016/j.tsf.2021.138639_bib0005) 2016; 34 Park (10.1016/j.tsf.2021.138639_bib0036) 2013; 500 Muraoka (10.1016/j.tsf.2021.138639_bib0033) 2002; 80 Blanquart (10.1016/j.tsf.2021.138639_bib0021) 2013; 3 Peter (10.1016/j.tsf.2021.138639_bib0022) 2015; 25 Guo (10.1016/j.tsf.2021.138639_bib0029) 2017; 7 Du (10.1016/j.tsf.2021.138639_bib0035) 2011; 95 |
References_xml | – volume: 54 start-page: 322 year: 2016 end-page: 329 ident: bib0038 article-title: Isothermal oxidation mechanism of a newly developed Nb–Ti–V–Cr–Al–W–Mo–Hf alloy at 800–1200°C publication-title: Intl. J. Refract. Metals Hard Mater. contributor: fullname: Zheng – volume: 201 start-page: 9334 year: 2007 end-page: 9339 ident: bib0016 article-title: Structure and electrical properties of selectively chemically vapor deposited vanadium oxide films from Vanadium tri-i-propoxy oxide vapors publication-title: Surf. Coat. Technol. contributor: fullname: Davazoglou – volume: 14 start-page: 1190 year: 2004 end-page: 1194 ident: bib0008 article-title: Atmospheric pressure chemical vapour deposition of VO publication-title: J. Mater. Chem. contributor: fullname: Parkin – volume: 42 start-page: 5157 year: 2013 end-page: 5183 ident: bib0032 article-title: Design of vanadium oxide structures with controllable electrical properties for energy applications publication-title: Chem. Soc. Rev. contributor: fullname: Xie – volume: 25 start-page: 29 year: 2009 end-page: 37 ident: bib0020 article-title: ALD of vanadium oxide publication-title: ECS Trans. contributor: fullname: Detavernier – volume: 3 start-page: 1179 year: 2013 end-page: 1185 ident: bib0021 article-title: Atomic layer deposition and characterization of vanadium oxide thin films publication-title: RSC Adv. contributor: fullname: Leskelä – volume: 9 start-page: 663 year: 2019 end-page: 672 ident: bib0025 article-title: Optical properties of VO publication-title: Opt. Mater. Express contributor: fullname: Wang – volume: 313 start-page: 368 year: 2014 end-page: 371 ident: bib0014 article-title: VO publication-title: Appl. Surf. Sci. contributor: fullname: An – volume: 687 year: 2019 ident: bib0004 article-title: Low thermal budget annealing for thermochromic VO publication-title: Thin Solid Films contributor: fullname: Chen – volume: 114 year: 2013 ident: bib0037 article-title: The role of ZrN capping layer deposited on ultra-thin high-k Zr-doped yttrium oxide for metal-gate metal–insulator–semiconductor applications publication-title: J. Appl. Phys. contributor: fullname: Huang – volume: 78 start-page: 19 year: 2016 end-page: 25 ident: bib0034 article-title: Preparation and phase transition properties of Ti-doped VO publication-title: J. Sol-Gel Sci. Tech. contributor: fullname: Lu – volume: 6 start-page: 3834 year: 2018 end-page: 3844 ident: bib0011 article-title: Polymer assisted deposition of epitaxial oxide thin films publication-title: J. Mater. Chem. C contributor: fullname: Rivadulla – volume: 80 start-page: 583 year: 2002 end-page: 585 ident: bib0033 article-title: Metal–insulator transition of VO publication-title: Appl. Phys. Lett. contributor: fullname: Hiroi – volume: 95 start-page: 469 year: 2011 end-page: 475 ident: bib0035 article-title: Significant changes in phase-transition hysteresis for Ti-doped VO publication-title: Sol. Energy Mater. Sol. Cells contributor: fullname: Cao – volume: 109 year: 2016 ident: bib0031 article-title: Optical and electrical performance of thermochromic V publication-title: Appl. Phys. Lett. contributor: fullname: Jin – volume: 1 year: 2015 ident: bib0001 article-title: Distinct substrate effect on the reversibility of the metal–insulator transitions in electrolyte-gated VO publication-title: Adv. Electron. Mater. contributor: fullname: Iwasa – volume: 51 start-page: 891 year: 2015 end-page: 896 ident: bib0017 article-title: Thermal decomposition of vanadyl acetylacetonate publication-title: Inorganic Mater. contributor: fullname: Kuznetsov – volume: 25 start-page: 679 year: 2015 end-page: 686 ident: bib0022 article-title: Metal-insulator transition in ALD VO publication-title: Adv. Funct. Mater. contributor: fullname: Radu – start-page: 3275 year: 2014 end-page: 3292 ident: bib0006 article-title: Advances in thermochromic vanadium dioxide films publication-title: J. Mater. Chem. A contributor: fullname: Binions – volume: 145 start-page: 1889 year: 1998 end-page: 1892 ident: bib0018 article-title: Highly stable vanadium oxide cathodes prepared by plasma-enhanced chemical vapor deposition publication-title: J. Electrochem. Soc. contributor: fullname: Benson – volume: 275 start-page: 1223 year: 2005 end-page: 1228 ident: bib0023 article-title: Thin films of VO publication-title: J. Cryst. Growth contributor: fullname: Shivashankar – volume: 500 start-page: 431 year: 2013 end-page: 434 ident: bib0036 article-title: Measurement of a solid-state triple point at the metal–insulator transition in VO publication-title: Nature contributor: fullname: Cobden – volume: 7 start-page: 10798 year: 2017 end-page: 10805 ident: bib0029 article-title: Low temperature fabrication of thermochromic VO publication-title: RSC Adv. contributor: fullname: Gao – volume: 11 start-page: 466 year: 2011 end-page: 470 ident: bib0002 article-title: Intrinsic optical properties of vanadium dioxide near the insulator−metal transition publication-title: Nano Lett. contributor: fullname: Wang – volume: 3 year: 2016 ident: bib0012 article-title: Single-crystalline W-doped VO publication-title: Adv. Mater. Interf. contributor: fullname: Long – volume: 34 start-page: 01A106 year: 2016 ident: bib0005 article-title: Vanadium dioxide film protected with an atomic-layer-deposited Al publication-title: J. Vac. Sci. Tech. A contributor: fullname: Li – volume: 8 start-page: 5158 year: 2018 end-page: 5165 ident: bib0010 article-title: Role of annealing temperature on the sol–gel synthesis of VO publication-title: RSC Adv. contributor: fullname: Kim – volume: 11 start-page: 136 year: 2015 end-page: 145 ident: bib0024 article-title: TiO publication-title: Nano Energy contributor: fullname: Jin – volume: 211 start-page: 200 year: 2018 end-page: 217 ident: bib0015 article-title: Vanadium dioxide for energy conservation and energy storage applications: Synthesis and performance improvement publication-title: Appl. Energy contributor: fullname: Long – volume: 117 year: 2015 ident: bib0003 article-title: Influence of grain size on transition temperature of thermochromic VO publication-title: J. Appl. Phys. contributor: fullname: Wang – volume: 12 start-page: 263 year: 2006 end-page: 274 ident: bib0007 article-title: The growth of thermochromic VO publication-title: Chem. Vap. Depos. contributor: fullname: Sheel – volume: 17 start-page: 4652 year: 2007 end-page: 4660 ident: bib0013 article-title: Doped and un-doped vanadium dioxide thin films prepared by atmospheric pressure chemical vapour deposition from vanadyl acetylacetonate and tungsten hexachloride: the effects of thickness and crystallographic orientation on thermochromic properties publication-title: J. Mater. Chem. contributor: fullname: Parkin – volume: 50 start-page: 267 year: 1997 end-page: 270 ident: bib0028 article-title: IR spectra of VO publication-title: Mater. Chem. Phys. contributor: fullname: Minelli – volume: 24 start-page: 1255 year: 2012 end-page: 1261 ident: bib0019 article-title: Ozone-based atomic layer deposition of crystalline V publication-title: Chem. Mater. contributor: fullname: Rubloff – volume: 396 start-page: 214 year: 2017 end-page: 220 ident: bib0027 article-title: Atomic layer deposition of VO publication-title: Appl. Surf. Sci. contributor: fullname: Song – volume: 520 start-page: 3823 year: 2012 ident: bib0030 article-title: Thermochromic fenestration with VO publication-title: Thin Solid Films contributor: fullname: Granqvist – volume: 3 start-page: 7124 year: 2013 end-page: 7128 ident: bib0009 article-title: Formation of VO publication-title: RSC Adv contributor: fullname: Long – year: 1992 ident: bib0026 article-title: Handbook of X-ray Photoelectron Spectroscopy contributor: fullname: Bomben – volume: 25 start-page: 679 year: 2015 ident: 10.1016/j.tsf.2021.138639_bib0022 article-title: Metal-insulator transition in ALD VO2 ultrathin films and nanoparticles: morphological control publication-title: Adv. Funct. Mater. doi: 10.1002/adfm.201402687 contributor: fullname: Peter – volume: 313 start-page: 368 year: 2014 ident: 10.1016/j.tsf.2021.138639_bib0014 article-title: VO2(110) film formation on TiO2(110) through post-reduction of ALD grown vanadium oxide publication-title: Appl. Surf. Sci. doi: 10.1016/j.apsusc.2014.05.216 contributor: fullname: Kim – volume: 3 start-page: 1179 year: 2013 ident: 10.1016/j.tsf.2021.138639_bib0021 article-title: Atomic layer deposition and characterization of vanadium oxide thin films publication-title: RSC Adv. doi: 10.1039/C2RA22820C contributor: fullname: Blanquart – volume: 211 start-page: 200 year: 2018 ident: 10.1016/j.tsf.2021.138639_bib0015 article-title: Vanadium dioxide for energy conservation and energy storage applications: Synthesis and performance improvement publication-title: Appl. Energy doi: 10.1016/j.apenergy.2017.11.039 contributor: fullname: Wang – volume: 8 start-page: 5158 year: 2018 ident: 10.1016/j.tsf.2021.138639_bib0010 article-title: Role of annealing temperature on the sol–gel synthesis of VO2 nanowires with in situ characterization of their metal–insulator transition publication-title: RSC Adv. doi: 10.1039/C7RA10865F contributor: fullname: Jo – volume: 201 start-page: 9334 year: 2007 ident: 10.1016/j.tsf.2021.138639_bib0016 article-title: Structure and electrical properties of selectively chemically vapor deposited vanadium oxide films from Vanadium tri-i-propoxy oxide vapors publication-title: Surf. Coat. Technol. doi: 10.1016/j.surfcoat.2007.05.016 contributor: fullname: Kritikos – volume: 34 start-page: 01A106 year: 2016 ident: 10.1016/j.tsf.2021.138639_bib0005 article-title: Vanadium dioxide film protected with an atomic-layer-deposited Al2O3 thin film publication-title: J. Vac. Sci. Tech. A doi: 10.1116/1.4931723 contributor: fullname: Wang – year: 1992 ident: 10.1016/j.tsf.2021.138639_bib0026 contributor: fullname: Moulder – volume: 78 start-page: 19 year: 2016 ident: 10.1016/j.tsf.2021.138639_bib0034 article-title: Preparation and phase transition properties of Ti-doped VO2 films by sol–gel process publication-title: J. Sol-Gel Sci. Tech. doi: 10.1007/s10971-015-3913-z contributor: fullname: Hu – volume: 12 start-page: 263 year: 2006 ident: 10.1016/j.tsf.2021.138639_bib0007 article-title: The growth of thermochromic VO2 films on glass by atmospheric-pressure CVD: A comparative study of precursors, CVD methodology, and substrates publication-title: Chem. Vap. Depos. doi: 10.1002/cvde.200506419 contributor: fullname: Vernardou – volume: 687 year: 2019 ident: 10.1016/j.tsf.2021.138639_bib0004 article-title: Low thermal budget annealing for thermochromic VO2 thin films prepared by high power impulse magnetron sputtering publication-title: Thin Solid Films doi: 10.1016/j.tsf.2019.137443 contributor: fullname: Juan – volume: 3 year: 2016 ident: 10.1016/j.tsf.2021.138639_bib0012 article-title: Single-crystalline W-doped VO2 nanobeams with highly reversible electrical and plasmonic responses near room temperature publication-title: Adv. Mater. Interf. doi: 10.1002/admi.201600164 contributor: fullname: Wang – volume: 1 year: 2015 ident: 10.1016/j.tsf.2021.138639_bib0001 article-title: Distinct substrate effect on the reversibility of the metal–insulator transitions in electrolyte-gated VO2 thin films publication-title: Adv. Electron. Mater. doi: 10.1002/aelm.201500093 contributor: fullname: Nakano – volume: 145 start-page: 1889 year: 1998 ident: 10.1016/j.tsf.2021.138639_bib0018 article-title: Highly stable vanadium oxide cathodes prepared by plasma-enhanced chemical vapor deposition publication-title: J. Electrochem. Soc. doi: 10.1149/1.1838572 contributor: fullname: Zhang – volume: 11 start-page: 466 year: 2011 ident: 10.1016/j.tsf.2021.138639_bib0002 article-title: Intrinsic optical properties of vanadium dioxide near the insulator−metal transition publication-title: Nano Lett. doi: 10.1021/nl1032205 contributor: fullname: Liu – volume: 50 start-page: 267 year: 1997 ident: 10.1016/j.tsf.2021.138639_bib0028 article-title: IR spectra of VO2 and V2O3 publication-title: Mater. Chem. Phys. doi: 10.1016/S0254-0584(97)01940-8 contributor: fullname: Botto – volume: 42 start-page: 5157 year: 2013 ident: 10.1016/j.tsf.2021.138639_bib0032 article-title: Design of vanadium oxide structures with controllable electrical properties for energy applications publication-title: Chem. Soc. Rev. doi: 10.1039/c3cs35508j contributor: fullname: Wu – volume: 114 year: 2013 ident: 10.1016/j.tsf.2021.138639_bib0037 article-title: The role of ZrN capping layer deposited on ultra-thin high-k Zr-doped yttrium oxide for metal-gate metal–insulator–semiconductor applications publication-title: J. Appl. Phys. doi: 10.1063/1.4819965 contributor: fullname: Juan – volume: 17 start-page: 4652 year: 2007 ident: 10.1016/j.tsf.2021.138639_bib0013 article-title: Doped and un-doped vanadium dioxide thin films prepared by atmospheric pressure chemical vapour deposition from vanadyl acetylacetonate and tungsten hexachloride: the effects of thickness and crystallographic orientation on thermochromic properties publication-title: J. Mater. Chem. doi: 10.1039/b708856f contributor: fullname: Binions – volume: 275 start-page: 1223 year: 2005 ident: 10.1016/j.tsf.2021.138639_bib0023 article-title: Thin films of VO2 on glass by atomic layer deposition: microstructure and electrical properties publication-title: J. Cryst. Growth doi: 10.1016/j.jcrysgro.2004.11.144 contributor: fullname: Dagur – volume: 6 start-page: 3834 year: 2018 ident: 10.1016/j.tsf.2021.138639_bib0011 article-title: Polymer assisted deposition of epitaxial oxide thin films publication-title: J. Mater. Chem. C doi: 10.1039/C8TC00626A contributor: fullname: Vila-Fungueiriño – volume: 9 start-page: 663 issue: 2 year: 2019 ident: 10.1016/j.tsf.2021.138639_bib0025 article-title: Optical properties of VO2 thin films deposited on different glass substrates publication-title: Opt. Mater. Express doi: 10.1364/OME.9.000663 contributor: fullname: Dai – start-page: 3275 issue: 2 year: 2014 ident: 10.1016/j.tsf.2021.138639_bib0006 article-title: Advances in thermochromic vanadium dioxide films publication-title: J. Mater. Chem. A doi: 10.1039/C3TA14124A contributor: fullname: Warwickab – volume: 54 start-page: 322 year: 2016 ident: 10.1016/j.tsf.2021.138639_bib0038 article-title: Isothermal oxidation mechanism of a newly developed Nb–Ti–V–Cr–Al–W–Mo–Hf alloy at 800–1200°C publication-title: Intl. J. Refract. Metals Hard Mater. doi: 10.1016/j.ijrmhm.2015.08.012 contributor: fullname: Zheng – volume: 51 start-page: 891 issue: 9 year: 2015 ident: 10.1016/j.tsf.2021.138639_bib0017 article-title: Thermal decomposition of vanadyl acetylacetonate publication-title: Inorganic Mater. doi: 10.1134/S0020168515090150 contributor: fullname: Nenashev – volume: 24 start-page: 1255 year: 2012 ident: 10.1016/j.tsf.2021.138639_bib0019 article-title: Ozone-based atomic layer deposition of crystalline V2O5 films for high performance electrochemical energy storage publication-title: Chem. Mater. doi: 10.1021/cm202901z contributor: fullname: Chen – volume: 95 start-page: 469 year: 2011 ident: 10.1016/j.tsf.2021.138639_bib0035 article-title: Significant changes in phase-transition hysteresis for Ti-doped VO2 films prepared by polymer-assisted deposition publication-title: Sol. Energy Mater. Sol. Cells doi: 10.1016/j.solmat.2010.08.035 contributor: fullname: Du – volume: 520 start-page: 3823 year: 2012 ident: 10.1016/j.tsf.2021.138639_bib0030 article-title: Thermochromic fenestration with VO2-based materials: three challenges and how they can be met publication-title: Thin Solid Films doi: 10.1016/j.tsf.2011.10.053 contributor: fullname: Li – volume: 109 year: 2016 ident: 10.1016/j.tsf.2021.138639_bib0031 article-title: Optical and electrical performance of thermochromic V2O3 thin film fabricated by magnetron sputtering publication-title: Appl. Phys. Lett. contributor: fullname: Sun – volume: 14 start-page: 1190 year: 2004 ident: 10.1016/j.tsf.2021.138639_bib0008 article-title: Atmospheric pressure chemical vapour deposition of VO2 and VO2/TiO2 films from the reaction of VOCl3, TiCl4 and water publication-title: J. Mater. Chem. doi: 10.1039/b316531k contributor: fullname: Qureshi – volume: 80 start-page: 583 issue: 4 year: 2002 ident: 10.1016/j.tsf.2021.138639_bib0033 article-title: Metal–insulator transition of VO2 thin films grown on TiO2 (001) and (110) substrates publication-title: Appl. Phys. Lett. doi: 10.1063/1.1446215 contributor: fullname: Muraoka – volume: 7 start-page: 10798 year: 2017 ident: 10.1016/j.tsf.2021.138639_bib0029 article-title: Low temperature fabrication of thermochromic VO2 thin films by low-pressure chemical vapor deposition publication-title: RSC Adv. doi: 10.1039/C6RA25071H contributor: fullname: Guo – volume: 396 start-page: 214 year: 2017 ident: 10.1016/j.tsf.2021.138639_bib0027 article-title: Atomic layer deposition of VO2 films with tetrakis-dimethyl-amino vanadium (IV) as vanadium precursor publication-title: Appl. Surf. Sci. doi: 10.1016/j.apsusc.2016.10.044 contributor: fullname: Lv – volume: 25 start-page: 29 year: 2009 ident: 10.1016/j.tsf.2021.138639_bib0020 article-title: ALD of vanadium oxide publication-title: ECS Trans. doi: 10.1149/1.3205040 contributor: fullname: Musschoot – volume: 500 start-page: 431 year: 2013 ident: 10.1016/j.tsf.2021.138639_bib0036 article-title: Measurement of a solid-state triple point at the metal–insulator transition in VO2 publication-title: Nature doi: 10.1038/nature12425 contributor: fullname: Park – volume: 11 start-page: 136 year: 2015 ident: 10.1016/j.tsf.2021.138639_bib0024 article-title: TiO2(R)/VO2(M)/TiO2(A) multilayer film as smart window: combination of energy-saving, antifogging and self-cleaning functions publication-title: Nano Energy doi: 10.1016/j.nanoen.2014.09.023 contributor: fullname: Zheng – volume: 117 year: 2015 ident: 10.1016/j.tsf.2021.138639_bib0003 article-title: Influence of grain size on transition temperature of thermochromic VO2 publication-title: J. Appl. Phys. doi: 10.1063/1.4906122 contributor: fullname: Miller – volume: 3 start-page: 7124 year: 2013 ident: 10.1016/j.tsf.2021.138639_bib0009 article-title: Formation of VO2 zero-dimensional/nanoporous layers with large supercooling effects and enhanced thermochromic properties publication-title: RSC Adv doi: 10.1039/c3ra40370j contributor: fullname: Wang |
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Snippet | •A growth temperature of 420°C for decomposition of VO(acac)2 is optimally required.•Thermochromic properties are present by atomic layer deposition with... |
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SubjectTerms | Atomic layer deposition Thermochromic films Vanadium dioxide, X-ray photoelectron spectroscopy |
Title | Atomic layer deposition of vanadium oxides using vanadyl acetylacetonate as the precursor |
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