Quantitative signal extraction in the dynamic range of nanomechanical systems by free and constrained fitting

• Published in: Sensors and actuators. A. Physical. Vol. 354; p. 114307
• Main Authors: Yang, Fan, Waitz, Reimar, Fu, Mengqi, Scheer, Elke
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.05.2023
• Subjects: Eigen parameter extraction; Mechanical resonator; Noise extraction; Physical model verification; Mechanical resonator; Noise extraction; Physical model verification; Eigen parameter extraction

We present a free and a constrained fitting procedure for determining the intrinsic response of a nanomechanical systems subject to noise and other environmental influences. We demonstrate that applying the free fitting procedure to the measured frequency response of amorphous silicon nitride (SiN)...