VOC sensing using batch-fabricated temperature compensated self-leveling microstructures

• Published in: Sensors and actuators. B, Chemical Vol. 311; p. 127817
• Main Authors: Likhite, Rugved, Banerjee, Aishwaryadev, Majumder, Apratim, Karkhanis, Mohit, Kim, Hanseup, Mastrangelo, Carlos H.
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 15.05.2020
• Subjects: Capacitive sensors; Polymer swelling; Self-leveling; Volatile organic compounds; Volatile organic compounds; Polymer swelling; Capacitive sensors; Self-leveling

[Display omitted] •Intrinsic temperature compensation mechanism based on mechanical self-leveling.•No externally powered temperature compensation electronics required.•Significant improvement to simple microcantilever type vapor sensors.•Polyimide, Polyurethane and PDMS polymers used for the detecti...