Influence of the ZnO:Al dispersion on the performance of ZnO:Al/Ag/ZnO:Al transparent electrodes

• Published in: Thin solid films Vol. 616; pp. 594 - 600
• Main Authors: Bingel, Astrid, Steglich, Martin, Naujok, Philipp, Müller, Robert, Schulz, Ulrike, Kaiser, Norbert, Tünnermann, Andreas
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.10.2016
• Subjects: Al-doped zinc oxide; Inline DC magnetron sputtering; Multilayer; Optical properties; Resistivity; Silver; Transparent conductive oxide; Silver; Al-doped zinc oxide; Multilayer; Optical properties; Resistivity; Transparent conductive oxide; Inline DC magnetron sputtering

Highly transparent and conductive Al-doped ZnO/Ag/Al-doped ZnO (AZO/Ag/AZO) multilayers were prepared by industrial inline DC magnetron sputtering on glass substrates at room temperature. With optimized film thicknesses of 37nm/10nm/37nm, an optimized low sheet resistance of only 6Ω/sq. and high tra...