Influence of the ZnO:Al dispersion on the performance of ZnO:Al/Ag/ZnO:Al transparent electrodes
Highly transparent and conductive Al-doped ZnO/Ag/Al-doped ZnO (AZO/Ag/AZO) multilayers were prepared by industrial inline DC magnetron sputtering on glass substrates at room temperature. With optimized film thicknesses of 37nm/10nm/37nm, an optimized low sheet resistance of only 6Ω/sq. and high tra...
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| Published in | Thin solid films Vol. 616; pp. 594 - 600 |
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| Main Authors | , , , , , , |
| Format | Journal Article |
| Language | English |
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Elsevier B.V
01.10.2016
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| Abstract | Highly transparent and conductive Al-doped ZnO/Ag/Al-doped ZnO (AZO/Ag/AZO) multilayers were prepared by industrial inline DC magnetron sputtering on glass substrates at room temperature. With optimized film thicknesses of 37nm/10nm/37nm, an optimized low sheet resistance of only 6Ω/sq. and high transmittances of T550=87.4% at 550nm and T400–800=79.9% in the spectral range between 400nm and 800nm were reached. Furthermore, an increase of the AZO/Ag/AZO-performance was achieved when a small amount of oxygen was added to the process gas during the AZO deposition which was found to be because of a beneficial adjustment of the AZO dispersion. In this way, owing to both a decreased extinction coefficient as well as a higher refractive index of the AZO film, the maximum transmittance of the AZO/Ag/AZO three-layer structure is further increased (T550=89.0%) and the bandwidth of the transmittance range is broadened (T400–800=83.3%). With the adaption of the AZO dispersion a very high Figure-of-Merit (Haacke) Φ400–800=26.2mΩ−1 and Φ550=52.9mΩ−1 was achieved by industrial inline DC magnetron sputtering process.
•AZO/Ag/AZO transparent electrodes by inline DC magnetron sputtering at room temperature•Study of AZO/Ag/AZO optical and electrical properties in dependence of AZO dispersion•Sheet resistance of 6Ωsq and transmittance of T=89% (at 550nm) were achieved.•Highest Figure-of-Merit Φ550=52.9mΩ−1 outreaching past results by DC sputtering |
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| AbstractList | Highly transparent and conductive Al-doped ZnO/Ag/Al-doped ZnO (AZO/Ag/AZO) multilayers were prepared by industrial inline DC magnetron sputtering on glass substrates at room temperature. With optimized film thicknesses of 37nm/10nm/37nm, an optimized low sheet resistance of only 6Ω/sq. and high transmittances of T550=87.4% at 550nm and T400–800=79.9% in the spectral range between 400nm and 800nm were reached. Furthermore, an increase of the AZO/Ag/AZO-performance was achieved when a small amount of oxygen was added to the process gas during the AZO deposition which was found to be because of a beneficial adjustment of the AZO dispersion. In this way, owing to both a decreased extinction coefficient as well as a higher refractive index of the AZO film, the maximum transmittance of the AZO/Ag/AZO three-layer structure is further increased (T550=89.0%) and the bandwidth of the transmittance range is broadened (T400–800=83.3%). With the adaption of the AZO dispersion a very high Figure-of-Merit (Haacke) Φ400–800=26.2mΩ−1 and Φ550=52.9mΩ−1 was achieved by industrial inline DC magnetron sputtering process.
•AZO/Ag/AZO transparent electrodes by inline DC magnetron sputtering at room temperature•Study of AZO/Ag/AZO optical and electrical properties in dependence of AZO dispersion•Sheet resistance of 6Ωsq and transmittance of T=89% (at 550nm) were achieved.•Highest Figure-of-Merit Φ550=52.9mΩ−1 outreaching past results by DC sputtering |
| Author | Müller, Robert Tünnermann, Andreas Bingel, Astrid Steglich, Martin Naujok, Philipp Schulz, Ulrike Kaiser, Norbert |
| Author_xml | – sequence: 1 givenname: Astrid surname: Bingel fullname: Bingel, Astrid email: astrid.bingel@iof.fraunhofer.de organization: Fraunhofer Institute for Applied Optics and Precision Engineering IOF, 07745 Jena, Germany – sequence: 2 givenname: Martin surname: Steglich fullname: Steglich, Martin organization: Institute of Applied Physics, Abbe Center of Photonics, Friedrich-Schiller-University Jena, 07745 Jena, Germany – sequence: 3 givenname: Philipp surname: Naujok fullname: Naujok, Philipp organization: Fraunhofer Institute for Applied Optics and Precision Engineering IOF, 07745 Jena, Germany – sequence: 4 givenname: Robert orcidid: 0000-0003-4329-9404 surname: Müller fullname: Müller, Robert organization: Fraunhofer Institute for Applied Optics and Precision Engineering IOF, 07745 Jena, Germany – sequence: 5 givenname: Ulrike surname: Schulz fullname: Schulz, Ulrike organization: Fraunhofer Institute for Applied Optics and Precision Engineering IOF, 07745 Jena, Germany – sequence: 6 givenname: Norbert surname: Kaiser fullname: Kaiser, Norbert organization: Fraunhofer Institute for Applied Optics and Precision Engineering IOF, 07745 Jena, Germany – sequence: 7 givenname: Andreas surname: Tünnermann fullname: Tünnermann, Andreas organization: Fraunhofer Institute for Applied Optics and Precision Engineering IOF, 07745 Jena, Germany |
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| Cites_doi | 10.1016/S0040-6090(01)01053-7 10.1016/j.jallcom.2014.07.105 10.1088/0268-1242/20/4/004 10.1016/S0040-6090(00)01341-9 10.1016/j.tsf.2012.07.124 10.1016/j.tsf.2014.02.042 10.1002/vipr.200500262 10.1016/j.solmat.2007.04.031 10.1016/j.apsusc.2004.05.266 10.1016/j.tsf.2012.02.080 10.1016/j.apsusc.2016.02.161 10.1063/1.4820266 10.1088/0370-1301/67/10/306 10.1016/j.solmat.2009.07.016 10.1103/PhysRev.93.632 10.1063/1.323240 10.1557/mrs2000.256 10.1017/S0305004100019952 10.1016/S0040-6090(98)01490-4 10.4313/TEEM.2013.14.1.9 10.1016/j.cap.2009.09.020 10.1515/aot-2012-0030 10.1016/j.surfcoat.2005.08.144 10.1103/PhysRevB.6.4370 10.1016/j.cap.2009.07.002 10.1016/S0040-6090(98)01519-3 10.1007/s00339-014-8222-9 10.7567/JJAP.55.04EJ15 10.1143/JJAP.49.111102 10.1016/j.tsf.2010.09.049 10.1103/PhysRevB.1.1382 10.1063/1.366798 10.1515/aot-2013-0044 10.1016/j.cap.2015.04.044 10.1088/0022-3727/45/50/505103 10.1016/S0040-6090(99)00086-3 10.1016/S0022-3093(97)00130-0 10.1016/j.solmat.2008.02.038 10.1002/vipr.200900396 10.1016/j.ceramint.2015.08.001 10.1016/j.tsf.2009.09.188 10.1038/nphoton.2012.282 10.1016/S0040-6090(98)00520-3 10.1016/j.tsf.2007.08.089 10.1063/1.3592975 10.1016/j.tsf.2005.07.313 |
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| Keywords | Silver Al-doped zinc oxide Multilayer Optical properties Resistivity Transparent conductive oxide Inline DC magnetron sputtering |
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| References | Eritt, May, Leo, Toerker, Radehaus (bb0030) 2010; 518 Bender, Seelig, Daube, Frankenberger, Ocker, Stollenwerk (bb0065) 1998; 326 Johnson, Christy (bb0085) 1972; 6 Kluth, Schöpe, Rech, Menner, Oertel, Orgassa, Schock (bb0240) 2006; 502 Klenk (bb0035) 2008 Wang, Chang (bb0060) 2016; 370 Guillén, Herrero (bb0075) 2008; 92 Bruker XRD Software LEPTOS. U.S. Geological Survey Minerals Information Crupi, Boscarino, Strano, Mirabella, Simone, Terrasi (bb0115) 2012; 520 Dimopoulos, Radnoczi, Pécz, Brückl (bb0070) 2010; 519 Arbab (bb0105) 2001; 381 Miao, Jiang, Zhao, Shang, Chen (bb0195) 2014; 616 Haacke (bb0235) 1976; 47 Ellmer (bb0015) 2012; 6 Kim, Moon, Kim, Yoo, Seong (bb0250) 2015; 41 Jung, Park, Kim (bb0135) 2013; 14 Sytchkova, Grilli, Rinaldi, Vedraine, Torchio, Piegari, Flory (bb0160) 2013; 114 Sahu, Lin, Huang (bb0110) 2008; 516 Theuring, Vehse, von Maydell, Agert (bb0150) 2014; 558 Zhang, Yabe, Akita, Wang, Murakami, Song (bb0155) 2011; 109 Song, Yang, Xin, Jiang, Li, Pang, Lv, Han (bb0125) 2010; 10 Sutthana, Hongsith, Choopun (bb0130) 2010; 10 Mayadas, Shatzkes (bb0210) 1970; 1 Park, Kang, Na, Kim, Kim (bb0145) 2009; 93 Fahland, Karlsson, Charton (bb0090) 2001; 392 Wu, Yang, Hsiung, Chu (bb0120) 2012; 520 Bingel, Füchsel, Kaiser, Tünnermann (bb0170) 2014; 3 Betz, Kharrazi Olsson, Marthy, Escola, Atamny (bb0020) 2006; 200 Zhou, Chen, Zhu, Sun, Sun (bb0140) 2012; 45 Fuchs (bb0205) 1938; 34 pubs/commodity/indium Katayama (bb0025) 1999; 341 Cebulla, Wendt, Ellmer (bb0245) 1998; 83 Stenzel, Wilbrandt, Friedrich, Kaiser (bb0175) 2009; 21 Heger, Stenzel, Kaiser (bb0185) 2005; 17 Sugimoto, Igarashi, Shirasaki, Kikuchi (bb0200) 2016; 55 Minami (bb0010) 2005; 20 Ginley, Bright (bb0005) 2000; 25 Stenzel, Macleod (bb0190) 2012; 1 Burstein (bb0215) 1954; 93 Szczyrbowski, Bräuer, Ruske, Schilling, Zmelty (bb0100) 1999; 351 Yu, Ma, Ji, Wang, Zhang, Cheng, Ma (bb0055) 2005; 239 Haynes (bb0080) 2012 Granqvist (bb0040) 2007; 91 Boscarino, Crupi, Mirabella, Simone, Terrasi (bb0165) 2014; 116 Grosse, Hertling, Müggenburg (bb0230) 1997; 218 Moss (bb0220) 1954; 67 Brehme, Fenske, Fuhs, Neubauer, Poschenrieder, Selle, Sieber (bb0050) 1999; 342 Cho, Lee (bb0095) 2010; 49 Lee, Na, Moon, Seong, Kim (bb0225) 2015; 15 Minami (10.1016/j.tsf.2016.09.032_bb0010) 2005; 20 Ellmer (10.1016/j.tsf.2016.09.032_bb0015) 2012; 6 Stenzel (10.1016/j.tsf.2016.09.032_bb0175) 2009; 21 Fuchs (10.1016/j.tsf.2016.09.032_bb0205) 1938; 34 Kluth (10.1016/j.tsf.2016.09.032_bb0240) 2006; 502 Sytchkova (10.1016/j.tsf.2016.09.032_bb0160) 2013; 114 Grosse (10.1016/j.tsf.2016.09.032_bb0230) 1997; 218 Mayadas (10.1016/j.tsf.2016.09.032_bb0210) 1970; 1 Ginley (10.1016/j.tsf.2016.09.032_bb0005) 2000; 25 Miao (10.1016/j.tsf.2016.09.032_bb0195) 2014; 616 Katayama (10.1016/j.tsf.2016.09.032_bb0025) 1999; 341 Klenk (10.1016/j.tsf.2016.09.032_bb0035) 2008 Zhang (10.1016/j.tsf.2016.09.032_bb0155) 2011; 109 Eritt (10.1016/j.tsf.2016.09.032_bb0030) 2010; 518 Arbab (10.1016/j.tsf.2016.09.032_bb0105) 2001; 381 Kim (10.1016/j.tsf.2016.09.032_bb0250) 2015; 41 Wang (10.1016/j.tsf.2016.09.032_bb0060) 2016; 370 Sahu (10.1016/j.tsf.2016.09.032_bb0110) 2008; 516 Betz (10.1016/j.tsf.2016.09.032_bb0020) 2006; 200 Haacke (10.1016/j.tsf.2016.09.032_bb0235) 1976; 47 Cebulla (10.1016/j.tsf.2016.09.032_bb0245) 1998; 83 Stenzel (10.1016/j.tsf.2016.09.032_bb0190) 2012; 1 10.1016/j.tsf.2016.09.032_bb0180 Haynes (10.1016/j.tsf.2016.09.032_bb0080) 2012 Theuring (10.1016/j.tsf.2016.09.032_bb0150) 2014; 558 Johnson (10.1016/j.tsf.2016.09.032_bb0085) 1972; 6 Sutthana (10.1016/j.tsf.2016.09.032_bb0130) 2010; 10 Boscarino (10.1016/j.tsf.2016.09.032_bb0165) 2014; 116 Guillén (10.1016/j.tsf.2016.09.032_bb0075) 2008; 92 Sugimoto (10.1016/j.tsf.2016.09.032_bb0200) 2016; 55 Zhou (10.1016/j.tsf.2016.09.032_bb0140) 2012; 45 Crupi (10.1016/j.tsf.2016.09.032_bb0115) 2012; 520 Wu (10.1016/j.tsf.2016.09.032_bb0120) 2012; 520 Lee (10.1016/j.tsf.2016.09.032_bb0225) 2015; 15 Brehme (10.1016/j.tsf.2016.09.032_bb0050) 1999; 342 Cho (10.1016/j.tsf.2016.09.032_bb0095) 2010; 49 Szczyrbowski (10.1016/j.tsf.2016.09.032_bb0100) 1999; 351 Burstein (10.1016/j.tsf.2016.09.032_bb0215) 1954; 93 Granqvist (10.1016/j.tsf.2016.09.032_bb0040) 2007; 91 Jung (10.1016/j.tsf.2016.09.032_bb0135) 2013; 14 Song (10.1016/j.tsf.2016.09.032_bb0125) 2010; 10 Yu (10.1016/j.tsf.2016.09.032_bb0055) 2005; 239 Fahland (10.1016/j.tsf.2016.09.032_bb0090) 2001; 392 Moss (10.1016/j.tsf.2016.09.032_bb0220) 1954; 67 10.1016/j.tsf.2016.09.032_bb0045 Park (10.1016/j.tsf.2016.09.032_bb0145) 2009; 93 Heger (10.1016/j.tsf.2016.09.032_bb0185) 2005; 17 Dimopoulos (10.1016/j.tsf.2016.09.032_bb0070) 2010; 519 Bender (10.1016/j.tsf.2016.09.032_bb0065) 1998; 326 Bingel (10.1016/j.tsf.2016.09.032_bb0170) 2014; 3 |
| References_xml | – volume: 6 start-page: 809 year: 2012 end-page: 817 ident: bb0015 article-title: Past achievements and future challenges in the development of optically transparent electrodes publication-title: Nat. Photonics contributor: fullname: Ellmer – volume: 326 start-page: 67 year: 1998 end-page: 71 ident: bb0065 article-title: Dependence of film composition and thickness on optical and electrical properties of ITO-metal-ITO multilayers publication-title: Thin Solid Films contributor: fullname: Stollenwerk – volume: 45 start-page: 505103 year: 2012 ident: bb0140 article-title: Improving temperature-stable AZO publication-title: J. Phys. D. Appl. Phys. contributor: fullname: Sun – volume: 20 start-page: S35 year: 2005 end-page: S44 ident: bb0010 article-title: Transparent conducting oxide semiconductors for transparent electrodes publication-title: Semicond. Sci. Technol. contributor: fullname: Minami – volume: 55 year: 2016 ident: bb0200 article-title: Thermal durability of AZO/Ag(Al)/AZO transparent conductive films publication-title: Jpn. J. Appl. Phys. contributor: fullname: Kikuchi – volume: 1 start-page: 1382 year: 1970 end-page: 1389 ident: bb0210 article-title: Electrical-resistivity model for polycrystalline films: the case of arbitrary reflection at external surfaces publication-title: Phys. Rev. B contributor: fullname: Shatzkes – volume: 92 start-page: 938 year: 2008 end-page: 941 ident: bb0075 article-title: ITO/metal/ITO multilayer structures based on Ag and Cu metal films for high-performance transparent electrodes publication-title: Sol. Energ. Mat. Sol. C. contributor: fullname: Herrero – volume: 6 start-page: 4370 year: 1972 end-page: 4379 ident: bb0085 article-title: Optical constants of the Noble metals publication-title: Phys. Rev. B contributor: fullname: Christy – year: 2008 ident: bb0035 article-title: Chalcopyrite Solar Cells and Modules publication-title: Transparent Conductive Zinc Oxide: Basics and Application in Thin Film Solar Cells contributor: fullname: Klenk – volume: 516 start-page: 4728 year: 2008 end-page: 4732 ident: bb0110 article-title: Investigation of conductive and transparent Al-doped ZnO/Ag/Al-doped ZnO multilayer coatings by electron beam evaporation publication-title: Thin Solid Films contributor: fullname: Huang – volume: 67 start-page: 775 year: 1954 end-page: 782 ident: bb0220 article-title: The interpretation of the properties of indium Antimonide publication-title: Proc. Phys. Soc. B contributor: fullname: Moss – volume: 370 start-page: 83 year: 2016 end-page: 91 ident: bb0060 article-title: Effect of substrate temperature on transparent conducting Al and F co-doped ZnO thin films prepared by rf magnetron sputtering publication-title: Appl. Surf. Sci. contributor: fullname: Chang – volume: 41 start-page: 14805 year: 2015 end-page: 14810 ident: bb0250 article-title: Al-doped ZnO/Ag/Al-doped ZnO multilayer films with a high figure of merit publication-title: Ceram. Int. contributor: fullname: Seong – volume: 218 start-page: 38 year: 1997 end-page: 43 ident: bb0230 article-title: Design of low emissivity systems based on a three-layer coating publication-title: J. Non-Cryst. Solids contributor: fullname: Müggenburg – volume: 109 start-page: 104318 year: 2011 ident: bb0155 article-title: Effect of silver evolution on conductivity and transmittance of ZnO/Ag thin films publication-title: J. Appl. Phys. contributor: fullname: Song – volume: 93 start-page: 632 year: 1954 end-page: 633 ident: bb0215 article-title: Anomalous optical absorption limit in InSb publication-title: Phys. Rev. contributor: fullname: Burstein – volume: 239 start-page: 222 year: 2005 end-page: 226 ident: bb0055 article-title: Preparation and properties of ZnO:Ga films prepared by r.f. magnetron sputtering at low temperature publication-title: Appl. Surf. Sci. contributor: fullname: Ma – volume: 342 start-page: 167 year: 1999 end-page: 173 ident: bb0050 article-title: Free-carrier plasma resonance effects and electron transport in reactively sputtered degenerate ZnO:Al films publication-title: Thin Solid Films contributor: fullname: Sieber – volume: 93 start-page: 1994 year: 2009 end-page: 2002 ident: bb0145 article-title: Characteristics of indium-free GZO/Ag/GZO and AZO/Ag/AZO multilayer electrode grown by dual target DC sputtering at room temperature for low-cost organic photovoltaics publication-title: Sol. Energ. Mat. Sol. C. contributor: fullname: Kim – volume: 502 start-page: 311 year: 2006 end-page: 316 ident: bb0240 article-title: Comparative material study on RF and DC magnetron sputtered ZnO:Al films publication-title: Thin Solid Films contributor: fullname: Schock – volume: 25 start-page: 15 year: 2000 end-page: 18 ident: bb0005 article-title: Transparent conducting oxides publication-title: MRS Bull. contributor: fullname: Bright – volume: 17 start-page: 199 year: 2005 end-page: 205 ident: bb0185 article-title: Design and fabrication of selective multilayer absorber based on silver island films publication-title: Vakuum in Forschung und Praxis contributor: fullname: Kaiser – volume: 14 start-page: 9 year: 2013 end-page: 11 ident: bb0135 article-title: Properties of AZO/Ag/AZO multilayer thin film deposited on Polyethersulfone substrate publication-title: Trans. Electr. Electron. Mater. contributor: fullname: Kim – volume: 10 start-page: 813 year: 2010 end-page: 816 ident: bb0130 article-title: AZO/Ag/AZO multilayer films prepared by DC magnetron sputtering for dye-sensitized solar cell application publication-title: Curr. Appl. Phys. contributor: fullname: Choopun – volume: 83 start-page: 1087 year: 1998 end-page: 1095 ident: bb0245 article-title: Al-doped zinc oxide films deposited by simultaneous rf and dc excitation of a magnetron plasma: relationships between plasma parameters and structural and electrical film properties publication-title: J. Appl. Phys. contributor: fullname: Ellmer – volume: 341 start-page: 140 year: 1999 end-page: 147 ident: bb0025 article-title: TFT-LCD technology publication-title: Thin Solid Films contributor: fullname: Katayama – volume: 520 start-page: 4432 year: 2012 end-page: 4435 ident: bb0115 article-title: Optimization of ZnO:Al/Ag/ZnO:Al structures for ultra-thin high performance transparent electrodes publication-title: Thin Solid Films contributor: fullname: Terrasi – volume: 116 start-page: 1287 year: 2014 end-page: 1291 ident: bb0165 article-title: TCO/Ag/TCO transparent electrodes for solar cells application publication-title: Appl. Phys. A Mater. contributor: fullname: Terrasi – year: 2012 ident: bb0080 article-title: CRC Handbook of Chemistry and Physics contributor: fullname: Haynes – volume: 200 start-page: 5751 year: 2006 end-page: 5759 ident: bb0020 article-title: Thin films engineering of indium tin oxide: large area flat panel displays application publication-title: Surf. Coat. Technol. contributor: fullname: Atamny – volume: 34 start-page: 100 year: 1938 end-page: 108 ident: bb0205 article-title: The conductivity of thin metallic films according to the electron theory of metals publication-title: Math. Proc. Cambridge contributor: fullname: Fuchs – volume: 1 start-page: 463 year: 2012 end-page: 481 ident: bb0190 article-title: Metal-dielectric composite optical coatings: underlying physics, main models, characterization, design and application aspects publication-title: Adv. Opt. Tech. contributor: fullname: Macleod – volume: 21 start-page: 15 year: 2009 end-page: 23 ident: bb0175 article-title: Realistische Modellierung der NIR/Vis/UV-optischen Konstanten dünner optischer Schichten im Rahmen des Oszillatormodells publication-title: Vakuum in Forschung und Praxis contributor: fullname: Kaiser – volume: 15 start-page: 833 year: 2015 end-page: 838 ident: bb0225 article-title: Design of near-unity transmittance dielectric/Ag/ITO electrodes for GaN-based light-emitting diodes publication-title: Curr. Appl. Phys. contributor: fullname: Kim – volume: 616 start-page: 26 year: 2014 end-page: 31 ident: bb0195 article-title: Characterization of AZO and Ag based films prepared by RF magnetron sputtering publication-title: J. Alloys Compd. contributor: fullname: Chen – volume: 519 start-page: 1470 year: 2010 end-page: 1474 ident: bb0070 article-title: Characterization of ZnO:Al/Au/ZnO:Al trilayers for high performance transparent conducting electrodes publication-title: Thin Solid Films contributor: fullname: Brückl – volume: 114 start-page: 094509 year: 2013 ident: bb0160 article-title: Radio frequency sputtered Al:ZnO-Ag transparent conductor: a plasmonic nanostructure with enhanced optical and electrical properties publication-title: J. Appl. Phys. contributor: fullname: Flory – volume: 381 start-page: 15 year: 2001 end-page: 21 ident: bb0105 article-title: Base laser effect on the d.c. conductivity and structure of direct current magnetron sputtered thin films of silver publication-title: Thin Solid Films contributor: fullname: Arbab – volume: 520 start-page: 7147 year: 2012 end-page: 7152 ident: bb0120 article-title: Influence of Ag thickness on aluminum-doped ZnO/Ag/aluminum-doped ZnO thin films publication-title: Thin Solid Films contributor: fullname: Chu – volume: 47 start-page: 4086 year: 1976 end-page: 4089 ident: bb0235 article-title: New figure of merit for transparent conductors publication-title: J. Appl. Phys. contributor: fullname: Haacke – volume: 558 start-page: 294 year: 2014 end-page: 297 ident: bb0150 article-title: AZO publication-title: Thin Solid Films contributor: fullname: Agert – volume: 91 start-page: 1529 year: 2007 end-page: 1598 ident: bb0040 article-title: Transparent conductors as solar energy materials: A panoramic review publication-title: Sol. Energ. Mat. Sol. C. contributor: fullname: Granqvist – volume: 392 start-page: 334 year: 2001 end-page: 337 ident: bb0090 article-title: Low resistivity transparent electrodes for displays on polymer substrates publication-title: Thin Solid Films contributor: fullname: Charton – volume: 49 start-page: 111102 year: 2010 ident: bb0095 article-title: Effect of added metallic elements in Ag alloys on the durability against heat and humidity of indium zinc oxide/Ag alloy/ indium zinc oxide transparent conductive multilayer system publication-title: Jpn. J. Appl. Phys. contributor: fullname: Lee – volume: 10 start-page: 452 year: 2010 end-page: 456 ident: bb0125 article-title: Effect of GZO thickness and annealing temperature on the structural, electrical and optical properties of GZO/Ag/GZO sandwich films publication-title: Curr. Appl. Phys. contributor: fullname: Han – volume: 351 start-page: 254 year: 1999 end-page: 259 ident: bb0100 article-title: New low emissivity coating based on TwinMag® sputtered TiO2 and Si3N4 layers publication-title: Thin Solid Films contributor: fullname: Zmelty – volume: 3 start-page: 103 year: 2014 end-page: 111 ident: bb0170 article-title: ZnO:Al films prepared by inline DC magnetron sputtering publication-title: Adv. Opt. Tech. contributor: fullname: Tünnermann – volume: 518 start-page: 3042 year: 2010 end-page: 3045 ident: bb0030 article-title: OLED manufacturing for large area lighting applications publication-title: Thin Solid Films contributor: fullname: Radehaus – volume: 392 start-page: 334 year: 2001 ident: 10.1016/j.tsf.2016.09.032_bb0090 article-title: Low resistivity transparent electrodes for displays on polymer substrates publication-title: Thin Solid Films doi: 10.1016/S0040-6090(01)01053-7 contributor: fullname: Fahland – volume: 616 start-page: 26 year: 2014 ident: 10.1016/j.tsf.2016.09.032_bb0195 article-title: Characterization of AZO and Ag based films prepared by RF magnetron sputtering publication-title: J. Alloys Compd. doi: 10.1016/j.jallcom.2014.07.105 contributor: fullname: Miao – volume: 20 start-page: S35 year: 2005 ident: 10.1016/j.tsf.2016.09.032_bb0010 article-title: Transparent conducting oxide semiconductors for transparent electrodes publication-title: Semicond. Sci. Technol. doi: 10.1088/0268-1242/20/4/004 contributor: fullname: Minami – volume: 381 start-page: 15 year: 2001 ident: 10.1016/j.tsf.2016.09.032_bb0105 article-title: Base laser effect on the d.c. conductivity and structure of direct current magnetron sputtered thin films of silver publication-title: Thin Solid Films doi: 10.1016/S0040-6090(00)01341-9 contributor: fullname: Arbab – volume: 520 start-page: 7147 year: 2012 ident: 10.1016/j.tsf.2016.09.032_bb0120 article-title: Influence of Ag thickness on aluminum-doped ZnO/Ag/aluminum-doped ZnO thin films publication-title: Thin Solid Films doi: 10.1016/j.tsf.2012.07.124 contributor: fullname: Wu – volume: 558 start-page: 294 year: 2014 ident: 10.1016/j.tsf.2016.09.032_bb0150 article-title: AZOAgAZO transparent electrode for amorphous silicon solar cells publication-title: Thin Solid Films doi: 10.1016/j.tsf.2014.02.042 contributor: fullname: Theuring – volume: 17 start-page: 199 year: 2005 ident: 10.1016/j.tsf.2016.09.032_bb0185 article-title: Design and fabrication of selective multilayer absorber based on silver island films publication-title: Vakuum in Forschung und Praxis doi: 10.1002/vipr.200500262 contributor: fullname: Heger – volume: 91 start-page: 1529 year: 2007 ident: 10.1016/j.tsf.2016.09.032_bb0040 article-title: Transparent conductors as solar energy materials: A panoramic review publication-title: Sol. Energ. Mat. Sol. C. doi: 10.1016/j.solmat.2007.04.031 contributor: fullname: Granqvist – volume: 239 start-page: 222 year: 2005 ident: 10.1016/j.tsf.2016.09.032_bb0055 article-title: Preparation and properties of ZnO:Ga films prepared by r.f. magnetron sputtering at low temperature publication-title: Appl. Surf. Sci. doi: 10.1016/j.apsusc.2004.05.266 contributor: fullname: Yu – volume: 520 start-page: 4432 year: 2012 ident: 10.1016/j.tsf.2016.09.032_bb0115 article-title: Optimization of ZnO:Al/Ag/ZnO:Al structures for ultra-thin high performance transparent electrodes publication-title: Thin Solid Films doi: 10.1016/j.tsf.2012.02.080 contributor: fullname: Crupi – volume: 370 start-page: 83 year: 2016 ident: 10.1016/j.tsf.2016.09.032_bb0060 article-title: Effect of substrate temperature on transparent conducting Al and F co-doped ZnO thin films prepared by rf magnetron sputtering publication-title: Appl. Surf. Sci. doi: 10.1016/j.apsusc.2016.02.161 contributor: fullname: Wang – volume: 114 start-page: 094509 year: 2013 ident: 10.1016/j.tsf.2016.09.032_bb0160 article-title: Radio frequency sputtered Al:ZnO-Ag transparent conductor: a plasmonic nanostructure with enhanced optical and electrical properties publication-title: J. Appl. Phys. doi: 10.1063/1.4820266 contributor: fullname: Sytchkova – volume: 67 start-page: 775 year: 1954 ident: 10.1016/j.tsf.2016.09.032_bb0220 article-title: The interpretation of the properties of indium Antimonide publication-title: Proc. Phys. Soc. B doi: 10.1088/0370-1301/67/10/306 contributor: fullname: Moss – volume: 93 start-page: 1994 year: 2009 ident: 10.1016/j.tsf.2016.09.032_bb0145 article-title: Characteristics of indium-free GZO/Ag/GZO and AZO/Ag/AZO multilayer electrode grown by dual target DC sputtering at room temperature for low-cost organic photovoltaics publication-title: Sol. Energ. Mat. Sol. C. doi: 10.1016/j.solmat.2009.07.016 contributor: fullname: Park – volume: 93 start-page: 632 year: 1954 ident: 10.1016/j.tsf.2016.09.032_bb0215 article-title: Anomalous optical absorption limit in InSb publication-title: Phys. Rev. doi: 10.1103/PhysRev.93.632 contributor: fullname: Burstein – ident: 10.1016/j.tsf.2016.09.032_bb0180 – volume: 47 start-page: 4086 year: 1976 ident: 10.1016/j.tsf.2016.09.032_bb0235 article-title: New figure of merit for transparent conductors publication-title: J. Appl. Phys. doi: 10.1063/1.323240 contributor: fullname: Haacke – volume: 25 start-page: 15 year: 2000 ident: 10.1016/j.tsf.2016.09.032_bb0005 article-title: Transparent conducting oxides publication-title: MRS Bull. doi: 10.1557/mrs2000.256 contributor: fullname: Ginley – volume: 34 start-page: 100 year: 1938 ident: 10.1016/j.tsf.2016.09.032_bb0205 article-title: The conductivity of thin metallic films according to the electron theory of metals publication-title: Math. Proc. Cambridge doi: 10.1017/S0305004100019952 contributor: fullname: Fuchs – volume: 342 start-page: 167 year: 1999 ident: 10.1016/j.tsf.2016.09.032_bb0050 article-title: Free-carrier plasma resonance effects and electron transport in reactively sputtered degenerate ZnO:Al films publication-title: Thin Solid Films doi: 10.1016/S0040-6090(98)01490-4 contributor: fullname: Brehme – volume: 14 start-page: 9 year: 2013 ident: 10.1016/j.tsf.2016.09.032_bb0135 article-title: Properties of AZO/Ag/AZO multilayer thin film deposited on Polyethersulfone substrate publication-title: Trans. Electr. Electron. Mater. doi: 10.4313/TEEM.2013.14.1.9 contributor: fullname: Jung – volume: 10 start-page: 813 year: 2010 ident: 10.1016/j.tsf.2016.09.032_bb0130 article-title: AZO/Ag/AZO multilayer films prepared by DC magnetron sputtering for dye-sensitized solar cell application publication-title: Curr. Appl. Phys. doi: 10.1016/j.cap.2009.09.020 contributor: fullname: Sutthana – volume: 1 start-page: 463 year: 2012 ident: 10.1016/j.tsf.2016.09.032_bb0190 article-title: Metal-dielectric composite optical coatings: underlying physics, main models, characterization, design and application aspects publication-title: Adv. Opt. Tech. doi: 10.1515/aot-2012-0030 contributor: fullname: Stenzel – volume: 200 start-page: 5751 year: 2006 ident: 10.1016/j.tsf.2016.09.032_bb0020 article-title: Thin films engineering of indium tin oxide: large area flat panel displays application publication-title: Surf. Coat. Technol. doi: 10.1016/j.surfcoat.2005.08.144 contributor: fullname: Betz – year: 2008 ident: 10.1016/j.tsf.2016.09.032_bb0035 article-title: Chalcopyrite Solar Cells and Modules contributor: fullname: Klenk – volume: 6 start-page: 4370 year: 1972 ident: 10.1016/j.tsf.2016.09.032_bb0085 article-title: Optical constants of the Noble metals publication-title: Phys. Rev. B doi: 10.1103/PhysRevB.6.4370 contributor: fullname: Johnson – volume: 10 start-page: 452 year: 2010 ident: 10.1016/j.tsf.2016.09.032_bb0125 article-title: Effect of GZO thickness and annealing temperature on the structural, electrical and optical properties of GZO/Ag/GZO sandwich films publication-title: Curr. Appl. Phys. doi: 10.1016/j.cap.2009.07.002 contributor: fullname: Song – volume: 341 start-page: 140 year: 1999 ident: 10.1016/j.tsf.2016.09.032_bb0025 article-title: TFT-LCD technology publication-title: Thin Solid Films doi: 10.1016/S0040-6090(98)01519-3 contributor: fullname: Katayama – volume: 116 start-page: 1287 year: 2014 ident: 10.1016/j.tsf.2016.09.032_bb0165 article-title: TCO/Ag/TCO transparent electrodes for solar cells application publication-title: Appl. Phys. A Mater. doi: 10.1007/s00339-014-8222-9 contributor: fullname: Boscarino – volume: 55 year: 2016 ident: 10.1016/j.tsf.2016.09.032_bb0200 article-title: Thermal durability of AZO/Ag(Al)/AZO transparent conductive films publication-title: Jpn. J. Appl. Phys. doi: 10.7567/JJAP.55.04EJ15 contributor: fullname: Sugimoto – volume: 49 start-page: 111102 year: 2010 ident: 10.1016/j.tsf.2016.09.032_bb0095 article-title: Effect of added metallic elements in Ag alloys on the durability against heat and humidity of indium zinc oxide/Ag alloy/ indium zinc oxide transparent conductive multilayer system publication-title: Jpn. J. Appl. Phys. doi: 10.1143/JJAP.49.111102 contributor: fullname: Cho – volume: 519 start-page: 1470 year: 2010 ident: 10.1016/j.tsf.2016.09.032_bb0070 article-title: Characterization of ZnO:Al/Au/ZnO:Al trilayers for high performance transparent conducting electrodes publication-title: Thin Solid Films doi: 10.1016/j.tsf.2010.09.049 contributor: fullname: Dimopoulos – volume: 1 start-page: 1382 year: 1970 ident: 10.1016/j.tsf.2016.09.032_bb0210 article-title: Electrical-resistivity model for polycrystalline films: the case of arbitrary reflection at external surfaces publication-title: Phys. Rev. B doi: 10.1103/PhysRevB.1.1382 contributor: fullname: Mayadas – volume: 83 start-page: 1087 year: 1998 ident: 10.1016/j.tsf.2016.09.032_bb0245 article-title: Al-doped zinc oxide films deposited by simultaneous rf and dc excitation of a magnetron plasma: relationships between plasma parameters and structural and electrical film properties publication-title: J. Appl. Phys. doi: 10.1063/1.366798 contributor: fullname: Cebulla – volume: 3 start-page: 103 year: 2014 ident: 10.1016/j.tsf.2016.09.032_bb0170 article-title: ZnO:Al films prepared by inline DC magnetron sputtering publication-title: Adv. Opt. Tech. doi: 10.1515/aot-2013-0044 contributor: fullname: Bingel – volume: 15 start-page: 833 year: 2015 ident: 10.1016/j.tsf.2016.09.032_bb0225 article-title: Design of near-unity transmittance dielectric/Ag/ITO electrodes for GaN-based light-emitting diodes publication-title: Curr. Appl. Phys. doi: 10.1016/j.cap.2015.04.044 contributor: fullname: Lee – year: 2012 ident: 10.1016/j.tsf.2016.09.032_bb0080 contributor: fullname: Haynes – volume: 45 start-page: 505103 year: 2012 ident: 10.1016/j.tsf.2016.09.032_bb0140 article-title: Improving temperature-stable AZOAgAZO multilayer transparent electrodes using thin Al layer modification publication-title: J. Phys. D. Appl. Phys. doi: 10.1088/0022-3727/45/50/505103 contributor: fullname: Zhou – volume: 351 start-page: 254 year: 1999 ident: 10.1016/j.tsf.2016.09.032_bb0100 article-title: New low emissivity coating based on TwinMag® sputtered TiO2 and Si3N4 layers publication-title: Thin Solid Films doi: 10.1016/S0040-6090(99)00086-3 contributor: fullname: Szczyrbowski – volume: 218 start-page: 38 year: 1997 ident: 10.1016/j.tsf.2016.09.032_bb0230 article-title: Design of low emissivity systems based on a three-layer coating publication-title: J. Non-Cryst. Solids doi: 10.1016/S0022-3093(97)00130-0 contributor: fullname: Grosse – volume: 92 start-page: 938 year: 2008 ident: 10.1016/j.tsf.2016.09.032_bb0075 article-title: ITO/metal/ITO multilayer structures based on Ag and Cu metal films for high-performance transparent electrodes publication-title: Sol. Energ. Mat. Sol. C. doi: 10.1016/j.solmat.2008.02.038 contributor: fullname: Guillén – volume: 21 start-page: 15 year: 2009 ident: 10.1016/j.tsf.2016.09.032_bb0175 article-title: Realistische Modellierung der NIR/Vis/UV-optischen Konstanten dünner optischer Schichten im Rahmen des Oszillatormodells publication-title: Vakuum in Forschung und Praxis doi: 10.1002/vipr.200900396 contributor: fullname: Stenzel – volume: 41 start-page: 14805 year: 2015 ident: 10.1016/j.tsf.2016.09.032_bb0250 article-title: Al-doped ZnO/Ag/Al-doped ZnO multilayer films with a high figure of merit publication-title: Ceram. Int. doi: 10.1016/j.ceramint.2015.08.001 contributor: fullname: Kim – volume: 518 start-page: 3042 year: 2010 ident: 10.1016/j.tsf.2016.09.032_bb0030 article-title: OLED manufacturing for large area lighting applications publication-title: Thin Solid Films doi: 10.1016/j.tsf.2009.09.188 contributor: fullname: Eritt – volume: 6 start-page: 809 year: 2012 ident: 10.1016/j.tsf.2016.09.032_bb0015 article-title: Past achievements and future challenges in the development of optically transparent electrodes publication-title: Nat. Photonics doi: 10.1038/nphoton.2012.282 contributor: fullname: Ellmer – volume: 326 start-page: 67 year: 1998 ident: 10.1016/j.tsf.2016.09.032_bb0065 article-title: Dependence of film composition and thickness on optical and electrical properties of ITO-metal-ITO multilayers publication-title: Thin Solid Films doi: 10.1016/S0040-6090(98)00520-3 contributor: fullname: Bender – volume: 516 start-page: 4728 year: 2008 ident: 10.1016/j.tsf.2016.09.032_bb0110 article-title: Investigation of conductive and transparent Al-doped ZnO/Ag/Al-doped ZnO multilayer coatings by electron beam evaporation publication-title: Thin Solid Films doi: 10.1016/j.tsf.2007.08.089 contributor: fullname: Sahu – volume: 109 start-page: 104318 year: 2011 ident: 10.1016/j.tsf.2016.09.032_bb0155 article-title: Effect of silver evolution on conductivity and transmittance of ZnO/Ag thin films publication-title: J. Appl. Phys. doi: 10.1063/1.3592975 contributor: fullname: Zhang – volume: 502 start-page: 311 year: 2006 ident: 10.1016/j.tsf.2016.09.032_bb0240 article-title: Comparative material study on RF and DC magnetron sputtered ZnO:Al films publication-title: Thin Solid Films doi: 10.1016/j.tsf.2005.07.313 contributor: fullname: Kluth – ident: 10.1016/j.tsf.2016.09.032_bb0045 |
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| SubjectTerms | Al-doped zinc oxide Inline DC magnetron sputtering Multilayer Optical properties Resistivity Silver Transparent conductive oxide |
| Title | Influence of the ZnO:Al dispersion on the performance of ZnO:Al/Ag/ZnO:Al transparent electrodes |
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