C-Band Lithium Niobate on Silicon Carbide SAW Resonator With Figure-of-Merit of 124 at 6.5 GHz

• Published in: Journal of microelectromechanical systems Vol. 33; no. 5; pp. 604 - 609
• Main Authors: Hsu, Tzu-Hsuan, Campbell, Joshua, Kramer, Jack, Cho, Sinwoo, Li, Ming-Huang, Lu, Ruochen
• Format: Journal Article
• Language: English
• Published: New York IEEE 01.10.2024; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Admittance; C band; Figure of merit; Frequency ranges; Lithium niobate; Lithium niobates; piezoelectric; Piezoelectric devices; Resonant frequency; Resonators; Silicon carbide; Surface acoustic wave; Surface acoustic wave devices; Surface acoustic waves; thin film; Thin films; Waveguides

In this work, we demonstrate a C-band shear-horizontal surface acoustic wave (SH-SAW) resonator with high electromechanical coupling (<inline-formula> <tex-math notation="LaTeX">{k}_{\mathbf {t}}^{\mathbf {2}} </tex-math></inline-formula>) of 22% and a quality facto...