Dynamic Modeling of a MEMS Electro-Thermal Actuator Considering Micro-Scale Heat Transfer With End Effectors - Zhu, Hengbo; Cao, Yun; Ma, Wanli; Kong, Xiaoyu; Lei, Shenghong; Lu, Haining; Nie, Weirong; Xi, Zhanwen (Journal of microelectromechanical systems, 2024)
Keywords: Actuators; Decoupling method; Dynamic model; Dynamic models; electro-thermal actuator (ETA); Electrothermal actuators; End effectors; Finite difference method; Finite element analysis; Finite element method; Heat transfer; Mathematical models; micro-scale heat transfer; Modelling; Thermal conductivity; two-way coupling