Modeling and Analysis of a MEMS Vibrating Ring Gyroscope Subject to Imperfections

• Published in: Journal of microelectromechanical systems Vol. 31; no. 4; pp. 546 - 560
• Main Authors: Hosseini-Pishrobat, Mehran, Tatar, Erdinc
• Format: Journal Article
• Language: English
• Published: New York IEEE 01.08.2022; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Anisotropic magnetoresistance; Anisotropy; Boundary conditions; Damping; Defects; Eigenvalues; Equations of motion; Error analysis; Finite element method; Frequency split; Gyroscopes; imperfections; Mathematical analysis; Mathematical models; MEMS gyroscope; Micromechanical devices; Modular structures; Modulus of elasticity; Perturbation methods; quadrature error; Quadratures; Rings (mathematics); Robustness (mathematics); Shape; Stiffness; Structural rings; Suspension systems; vibrating ring

We present a new mathematical model for a vibrating ring gyroscope (VRG) in the presence of imperfections, namely, structural defects and material anisotropy. As a novelty, we calculate the mode shapes of the internal suspension structure to enable a more accurate and modular analysis of the VRG...