Modeling and Analysis of a MEMS Vibrating Ring Gyroscope Subject to Imperfections - Hosseini-Pishrobat, Mehran; Tatar, Erdinc (Journal of microelectromechanical systems, 2022)
Keywords: Anisotropic magnetoresistance; Anisotropy; Boundary conditions; Damping; Defects; Eigenvalues; Equations of motion; Error analysis; Finite element method; Frequency split; Gyroscopes; imperfections; Mathematical analysis; Mathematical models; MEMS gyroscope; Micromechanical devices; Modular structures; Modulus of elasticity; Perturbation methods; quadrature error; Quadratures; Rings (mathematics); Robustness (mathematics); Shape; Stiffness; Structural rings; Suspension systems; vibrating ring