CMOS-Integrated Aluminum Nitride MEMS: A Review - Pinto, Rui M. R.; Gund, Ved; Dias, Rosana Alves; Nagaraja, K. K.; Vinayakumar, K. B. (Journal of microelectromechanical systems, 2022)
Keywords: Acoustic properties; AlN; Aluminum; Aluminum nitride; Bulk acoustic wave devices; CMOS; Dielectric strength; Energy harvesting; Flexible components; Gallium nitrides; Gas sensors; III-V semiconductor materials; integration; Lead zirconate titanates; Lithium niobates; Material properties; MEMS; Microelectromechanical systems; Micromechanical devices; Microphones; Modulus of elasticity; monolithic; Piezoelectric effect; Piezoelectricity; Resonators; Sensors; SoC; Strain; Thermal conductivity; Thin films; Transducers; Zinc oxide