APA (7th ed.) Citation

Pinto, R. M. R., Gund, V., Dias, R. A., Nagaraja, K. K., & Vinayakumar, K. B. (2022). CMOS-Integrated Aluminum Nitride MEMS: A Review. Journal of microelectromechanical systems, 31(4), 500-523. https://doi.org/10.1109/JMEMS.2022.3172766

Chicago Style (17th ed.) Citation

Pinto, Rui M. R., Ved Gund, Rosana Alves Dias, K. K. Nagaraja, and K. B. Vinayakumar. "CMOS-Integrated Aluminum Nitride MEMS: A Review." Journal of Microelectromechanical Systems 31, no. 4 (2022): 500-523. https://doi.org/10.1109/JMEMS.2022.3172766.

MLA (9th ed.) Citation

Pinto, Rui M. R., et al. "CMOS-Integrated Aluminum Nitride MEMS: A Review." Journal of Microelectromechanical Systems, vol. 31, no. 4, 2022, pp. 500-523, https://doi.org/10.1109/JMEMS.2022.3172766.