Influence of electrode configurations on the quality factor and piezoelectric coupling constant of solidly mounted bulk acoustic wave resonators

• Published in: Journal of applied physics Vol. 92; no. 7; pp. 4062 - 4069
• Main Authors: Lee, Si-Hyung, Yoon, Ki Hyun, Lee, Jeon-Kook
• Format: Journal Article
• Language: English
• Published: 01.10.2002

This article presents an electrode effect on the quality factor and effective coupling coefficient empirically and theoretically. The possible quality factor detractors in film bulk acoustic wave resonator devices are the acoustic wave attenuation in the metal and piezoelectric films, the wave scatt...