Airborne Piezoelectric Micromachined Ultrasonic Transducers for Long-Range Detection

• Published in: Journal of microelectromechanical systems Vol. 30; no. 1; pp. 81 - 89
• Main Authors: Luo, Guo-Lun, Kusano, Yuri, Horsley, David A.
• Format: Journal Article
• Language: English
• Published: New York IEEE 01.02.2021; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Acoustic absorption; Acoustics; airborne; Aluminum nitride; Arrays; Fabrication; III-V semiconductor materials; Lead zirconate titanates; MEMS; Micromachining; Permittivity; piezoelectric; Piezoelectricity; PMUT; PZT; range detection; Sensitivity; Silicon; Single crystals; Sound pressure; Transducers; Ultrasonic testing; Ultrasonic transducers; ultrasound

This paper presents an airborne piezoelectric micromachined ultrasonic transducers (PMUTs) operated at low frequency (40-50 kHz) for long-range detection, where the acoustic absorption loss in air is relatively low (0.8-1 dB/m). The PMUTs made with single-crystal Lead Zirconate Titanate (PZT) enable...